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AssigneeDemcon Tsst B.V.
InventorsEmiel Daniël RUTGERS, Augustinus Josephus Helena Maria RIJNDERS, Dominic POST
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Scanning probe microscopy device, comprising a probe and a substrate holder comprising a substrate holding portion for holding a material deposition substrate, where-in the substrate holder is movable relative to the probe between a deposition state, in which the substrate holding portion is positioned to hold the substrate for a material layer to be deposited on a surface of the substrate, and a scanning state, in which the substrate holding portion is positioned adjacent to the probe and the probe is arranged for scanning a surface of the deposited material layer, wherein the substrate holder is rotatable between the deposition state and the scanning state about a rotation axis and the substrate holding portion is arranged to hold the substrate with its surface facing radially outwards with respect to the rotation axis.
A scanning probe microscopy device, comprising a probe and a substrate holder comprising a substrate holding portion for holding a material deposition substrate, wherein the substrate holder is movable relative to the probe between a deposition state, in which the substrate holding portion is positioned to hold the substrate for a material layer to be deposited on a surface of the substrate, and a scanning state, in which the substrate holding portion is positioned adjacent to the probe and the probe is arranged for scanning a surface of the deposited material layer, wherein the substrate holder is rotatable between the deposition state and the scanning state about a rotation axis and the substrate holding portion is arranged to hold the substrate with its surface facing radially outwards with respect to the rotation axis.
Dependencies are inferred from the claim text.