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US 12,650,585 B2Granted
Scanning probe microscope
AssigneeHitachi, Ltd.
InventorsMasanari Koguchi, Teruo Kohashi, Tomihiro Hashizume
Life of this patent
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Abstract
A scanning probe microscope for determining a measurement location when a numerical aperture of an objective lens is relatively large. The scanning probe microscope includes a probe which scans a sample; a light source which irradiates the probe with excitation light via an objective lens; a detector which detects fluorescence generated at the probe; a reflective member arranged between the objective lens and the sample; and an imaging device which images a reflecting surface of the reflective member.
Claims8
A scanning probe microscope, comprising:
- a probe which scans a sample;
- a light source which irradiates the probe with excitation light via an objective lens;
- and
- a detector which detects fluorescence generated at the probe,
- wherein the scanning probe microscope further includes:
- a reflective member arranged between the objective lens and the sample;
- and
- a reflecting surface imaging device which images a reflecting surface of the reflective member.
5 more elements
Dependencies are inferred from the claim text.