G01N 23/2254
Measuring cathodoluminescence
G01N23/2254 (Measuring cathodoluminescence) appears on 38 US grants and 43 published applications in this corpus.
Search patents in G01N- Granted patents
- 38
- Published applications
- 43
- Assignees
- 33
- Inventors
- 110
- Latest grant
- 21 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 1 |
| 2012 | 0 | 0 |
| 2013 | 1 | 3 |
| 2014 | 3 | 4 |
| 2015 | 1 | 2 |
| 2016 | 1 | 3 |
| 2017 | 4 | 3 |
| 2018 | 4 | 3 |
| 2019 | 3 | 3 |
| 2020 | 2 | 3 |
| 2021 | 1 | 2 |
| 2022 | 3 | 6 |
| 2023 | 4 | 3 |
| 2024 | 5 | 5 |
| 2025 | 1 | 2 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Material analysis with multiple detectors21 Apr 2026US 12,607,581 B2Oxford Instruments Nanotechnology Tools Limited
- ULED chip, uLED substrate and method for manufacturing the same, el inspection method for uLED substrate, and el inspection apparatus4 Feb 2025US 12,218,273 B2Boe Technology Group Co., Ltd.
- Dual speed acquisition for drift corrected, fast, low dose, adaptive compositional charged particle imaging5 Nov 2024US 12,136,532 B2FEI Company
- Apparatus and method for projecting an array of multiple charged particle beamlets on a sample22 Oct 2024US 12,123,841 B2Delmic IP B.V.
- Cost effective probing in high volume manufacture of micro LEDs18 Jun 2024US 12,014,896 B2Attolight AG
- Optical apparatus5 Jun 2025US 2025/0180486 A1Renishaw PLC
- Optical apparatus1 May 2025US 2025/0137932 A1Renishaw PLC
- Polishing State Analysis Prediction Program, Storage Device, Cathodeluminescence Device, and Polishing State Analysis Prediction Method4 Jul 2024US 2024/0217061 A1National University Corporation Nagaoka University of Technology
- Surface characterization of materials using cathodoluminescence18 Apr 2024US 2024/0125718 A1Silanna UV Technologies Pte Ltd
- Methods of inspecting samples with a beam of charged particles8 Feb 2024US 2024/0044820 A1ASML Netherlands B. V.
Most cited
By later US patents
- Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector13US 4,900,932 ACarl-Zeiss-Stiftung · 1990
- Apparatus and method for measuring the time evolution of carriers propogating within submicron and micron electronic devices13US 5,034,903 A1991
- Detection system for cathodoluminescence analysis5US 5,010,253 ASIP - Societa Italiana per L-Esercizio Delle Telecomunicazioni P.A. · 1991
- System and method for cathodoluminescence-based semiconductor wafer defect inspection3US 10,018,579 B1KLA-Tencor Corporation · 2018
- Apparatus for determining the density of unoccupied electronic states of a material3US 4,472,634 ACommissariat A L' Energie Atomique · 1984