Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector
AssigneeCarl-Zeiss-Stiftung
InventorsNorbert Schafer, Eugen Weimer, Herbert Gross, Bernd Eppli, Eberhard Rossow
Life of this patent
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Abstract
A detector is disclosed which includes an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope. A vacuum window is seated at the outer end portion of the tube directly ahead of a receiver.
Claims24
A cathodoluminescence detector for receiving light emitted from a specimen irradiated by an electron beam, the cathodoluminescence detector comprising:
- a clear hollow tube having first and second end portions;
- a concave mirror mounted at said first end portion for receiving light from the specimen and reflecting the same into said tube;
- a vacuum window mounted at said second end portion;
- said tube defining a longitudinal axis and having a reflective inner wall surface for conducting the light from said concave mirror to said vacuum window;
- and,
- a photoelectric receiver mounted next to said vacuum window for receiving the light passing through the latter from said tube.
A cathodoluminescence detector arrangement for a scanning electron microscope which generates an electron beam for scanning a specimen, the microscope including a specimen chamber for holding the specimen to be investigated and the chamber having a mounting wall, the arrangement comprising:
- a clear hollow tube having first and second end portions;
- a concave mirror disposed at said first end portion for receiving light from the specimen and reflecting the same into said tube;
- a vacuum window mounted at said second end portion;
- said tube defining a longitudinal axis and having a reflective inner wall surface for conducting the light from said concave mirror to said vacuum window;
- a photoelectric receiver mounted next to said vacuum window for receiving the light passing through the latter from said tube;
- said receiver and said tube being an interconnected assembly mounted on the mounting wall of the specimen chamber so as to be displaceable with respect thereto in the direction of said axis;
- sealing means for permitting a seal-tight displacement of said assembly relative to the specimen chamber;
- and,
- said assembly including means for providing a reproducible positioning of said first end portion when said assembly is adjusted to place said concave mirror above the specimen to receive light emanating therefrom.
A cathodoluminescence detector arrangement for a scanning electron microscope which generates an electron beam for scanning a specimen, the microscope including a specimen chamber for holding the specimen to be investigated and the chamber having a mounting wall, the arrangement comprising:
- a clear hollow tube having first and second end portions;
- a concave mirror disposed at said first end portion for receiving light from the specimen and reflecting the same into said tube;
- mounting means for detachably mounting said concave mirror to said tube to facilitate the mounting and replacement of said concave mirror on said tube;
- a vacuum window mounted at said second end portion;
- a photoelectric receiver mounted next to said vacuum window for receiving the light passing through the latter from said tube;
- said receiver and said tube being an interconnected assembly mounted on the mounting wall of the specimen chamber so as to be displaceable with respect thereto in the direction of said axis;
- sealing means for permitting a seal-tight displacement of said assembly relative to the specimen chamber;
- said assembly including means for providing a reproducible positioning of said first end portion when said assembly is adjusted to place said concave mirror above the specimen to receive light emanating therefrom;
- and,
- said mounting means including alignment means for aligning said concave mirror with respect to said tube.
A cathodoluminescence detector arrangement for a scanning electron microscope which generates an electron beam for scanning a specimen, the microscope including a specimen chamber for holding the specimen to be investigated and the chamber having a mounting wall, the arrangement comprising:
- a clear hollow tube having first and second end portions;
- a concave mirror disposed at said first end portion for receiving light from the specimen and reflecting the same into said tube;
- mounting means for detachably mounting said concave mirror to said tube to facilitate the mounting and replacement of said concave mirror on said tube;
- a vacuum window mounted at said second end portion;
- a photoelectric receiver mounted next to said vacuum window for receiving the light passing through the latter from said tube;
- said receiver and said tube being an interconnected assembly mounted on the mounting wall of the specimen chamber so as to be displaceable with respect thereto in the direction of said axis;
- sealing means for permitting a seal-tight displacement of said assembly relative to the specimen chamber;
- said assembly including means for providing a reproducible positioning of said first end portion when said assembly is adjusted to place said concave mirror above the specimen to receive light emanating therefrom;
- said concave mirror being disposed at an elevation above the specimen;
- and,
- said tube being likewise disposed at an elevation above the specimen and having an opening at said first end portion disposed directly adjacent said concave mirror.
A cathodoluminescence detector for receiving light emitted from a specimen irradiated by an electron beam, the cathodoluminescence detector comprising:
- a clear hollow tube having first and second end portions;
- a concave mirror mounted at said first end portion for receiving light from the specimen and reflecting the same into said tube;
- a vacuum window mounted at said second end portion;
- said tube defining a longitudinal axis and having a reflective inner wall surface for conducting the light from said concave mirror to said vacuum window;
- a photoelectric receiver mounted next to said vacuum window for receiving the light passing through the latter from said tube;
- and,
- mounting means for detachably mounting said concave mirror to said tube thereby facilitating the mounting and replacement of said concave mirror on said tube.
A cathodoluminescence detector for receiving light emitted from a specimen irradiated by an electron beam, the cathodoluminescence detector comprising:
- a clear hollow tube having first and second end portions;
- a concave mirror mounted at said first end portion for receiving light from the specimen and reflecting the same into said tube;
- a vacuum window mounted at said second end portion;
- said tube defining a longitudinal axis and having a reflective inner wall surface for conducting the light from said concave mirror to said vacuum window;
- a photoelectric receiver mounted next to said vacuum window for receiving the light passing through the latter from said tube;
- said concave mirror being disposed at an elevation above the specimen;
- and,
- said tube being likewise disposed at an elevation above the specimen and having an opening at said first end portion disposed directly adjacent said concave mirror.
Dependencies are inferred from the claim text.