Surface characterization of materials using cathodoluminescence
AssigneeSilanna UV Technologies Pte Ltd
InventorsPetar Atanackovic, Dominic Lane
Life of this patent
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Abstract
Methods and systems include generating, from an electron beam generator, an electron beam in a vacuum chamber. A mounting platform in the vacuum chamber is configured to support a material. The electron beam is directed at a surface region of the material at a grazing angle. A detector assembly, which may have an optical entry path positioned above the surface region, receives cathodoluminescent light emission arising from the electron beam transferring energy to the surface region. The detector assembly determines spectral characteristics of the cathodoluminescent light emission to characterize the surface region.
Claims29
A method for characterizing a surface region of a material, the method comprising:
- generating, from an electron beam generator, an electron beam in a vacuum chamber;
- directing the electron beam at the surface region of the material, at a grazing angle;
- receiving, by a detector assembly, cathodoluminescent light emission arising from the electron beam transferring energy to the surface region, wherein the detector assembly is positioned above the surface region and operates within a vacuum environment;
- and
- determining by the detector assembly, spectral characteristics of the cathodoluminescent light emission to characterize the surface region.
A method for characterizing a surface region of a material, the method comprising:
- generating, from an electron beam generator coupled to a side wall of a vacuum chamber, an electron beam in the vacuum chamber;
- directing the electron beam at the surface region of the material, at a grazing angle;
- receiving, by a detector assembly, cathodoluminescent light emission arising from the electron beam transferring energy to the surface region, wherein an optical entry path of the detector assembly is positioned above the surface region;
- and
- determining, by the detector assembly, spectral characteristics of the cathodoluminescent light emission to characterize the surface region.
Dependencies are inferred from the claim text.