Detection system for cathodoluminescence analysis
AssigneeSIP - Societa Italiana per l'Esercizio Delle Telecomunicazioni P.A.
InventorsMarco Braglia, Roberto DeFranceschi, Paolo Montangero
Life of this patent
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Abstract
Detection system for cathodoluminescence analysis apparatus, wherein a screen is placed between the sample to be analyzed and the detector to intercept the electrons backscattered by the sample towards the detector. The screen is a plate of a glass which is transparent in a wide spectral interval, has a rather high conductivity, and does not present cathodoluminescence effects.
Claims7
A detection system for material analysis by cathodoluminescence, comprising:
- means for directing a beam of electrons onto a sample of a material to be analyzed whereby said sample generated photons characteristic of said material;
- a detector positioned proximal to said sample for receiving photons generated by said sample;
- and
- a photon-passing electron-blocking screen disposed between said sample and said detector to intercept electrons from said sample and prevent impingement of electrons from said sample on said detector, said screen being constituted of a plate of a glass selected from the group which consists of fluoride glasses, chalcogenide glasses and Ag-based glasses.
A detection system for material analysis by cathodoluminescence, comprising:
- means for directing a beam of electrons onto a sample of a material to be analyzed whereby said sample generated photons characteristic of said material;
- a detector positioned proximal to said sample for receiving photons generated by said sample;
- and
- a photon-passing electron-blocking screen disposed between said sample and said detector to intercept electrons from said sample and prevent impingement of electrons from said sample on said detector, said screen being constituted of a plate of a glass selected from the group which consists of fluoride glasses, selected from the group which consists of fluorozirconate and fluorohafnate glasses and Ag-based glasses containing a mixture of AgI and silver oxysalts.
Dependencies are inferred from the claim text.