Dual speed acquisition for drift corrected, fast, low dose, adaptive compositional charged particle imaging

A system for scanning a sample with a charged particle microscopy system, the system comprising:

• a sample holder configured to hold a sample;
• a charged particle source configured to emit a beam of charged particles towards the sample;
• an optical column configured to cause the beam of charged particles to be incident on the sample;
• one or more detectors configured to detect charged particles of the charged particle beam and/or emissions resultant from the charged particle beam being incident on the sample, the one or more detectors comprising at least a first detector of a first modality and a second detector of a second modality;
• one or more processors;
• and
• a memory storing computer readable instructions that, when executed by the one or more processors, cause the system to:
• identify a structure of interest in a first image of a surface region of a sample;
• determine a scan strategy for the surface region, the scan strategy comprising:
• a charged particle beam path;
• a first beam dwell time associated with at least one region including the structure of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a first detector modality;
• and
• at least a second beam dwell time associated with other regions of the first image to obtain data from a second detector modality, wherein the first beam dwell time is different than the second beam dwell time;
• scan the surface region of the sample according to the scan strategy;
• obtain, based on the surface region of the sample being scanned according to the scan strategy, first data from the first detector modality;
• and
• obtain, based on the surface region of the sample being scanned according to the scan strategy, second data from the second modality.