F27B 17/0016
Chamber type furnaces
Official title: {Chamber type furnaces}
F27B17/0016 (Chamber type furnaces) appears on 789 US grants and 815 published applications in this corpus.
Search patents in F27B- Granted patents
- 789
- Published applications
- 815
- Assignees
- 434
- Inventors
- 2,045
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 0 | 0 |
| 1978 | 5 | 0 |
| 1979 | 3 | 0 |
| 1980 | 4 | 0 |
| 1981 | 6 | 0 |
| 1982 | 4 | 0 |
| 1983 | 6 | 0 |
| 1984 | 5 | 0 |
| 1985 | 11 | 0 |
| 1986 | 8 | 0 |
| 1987 | 7 | 0 |
| 1988 | 6 | 0 |
| 1989 | 10 | 0 |
| 1990 | 17 | 0 |
| 1991 | 11 | 0 |
| 1992 | 17 | 0 |
| 1993 | 10 | 0 |
| 1994 | 6 | 0 |
| 1995 | 12 | 0 |
| 1996 | 12 | 0 |
| 1997 | 10 | 0 |
| 1998 | 16 | 0 |
| 1999 | 4 | 0 |
| 2000 | 11 | 0 |
| 2001 | 3 | 2 |
| 2002 | 7 | 8 |
| 2003 | 13 | 13 |
| 2004 | 21 | 32 |
| 2005 | 15 | 38 |
| 2006 | 30 | 42 |
| 2007 | 13 | 30 |
| 2008 | 25 | 47 |
| 2009 | 15 | 33 |
| 2010 | 31 | 34 |
| 2011 | 22 | 24 |
| 2012 | 28 | 47 |
| 2013 | 29 | 40 |
| 2014 | 23 | 33 |
| 2015 | 27 | 33 |
| 2016 | 27 | 41 |
| 2017 | 40 | 21 |
| 2018 | 23 | 23 |
| 2019 | 22 | 15 |
| 2020 | 21 | 20 |
| 2021 | 17 | 42 |
| 2022 | 15 | 47 |
| 2023 | 29 | 35 |
| 2024 | 35 | 48 |
| 2025 | 41 | 32 |
| 2026 | 14 | 35 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- F27B 17/0025Specially adapted for treating semiconductor wafers469
- F27B 17/0083With means for circulating the atmosphere85
- F27B 17/0041Specially adapted for burning bricks or pottery35
- F27B 2017/0091Series of chambersIndexing code25
- F27B 17/0033The floor of the furnaces consisting of the support carrying the charge23
Recent patents
- Semiconductor high pressure annealing device25 Aug 2026US 12,721,088 B2Tokyo Electron Limited
- Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and non-transitory computer-readable recording medium25 Aug 2026US 12,721,093 B2Kokusai Electric Corporation
- High pressure heat treatment apparatus4 Aug 2026US 12,698,939 B2HPSP Co., Ltd.
- Method, apparatus and system for processing a composite waste source26 May 2026US 12,637,737 B2NewSouth Innovations Pty Limited
- Heater system for catheter manufacturing5 May 2026US 12,618,616 B2
- Heat treatment apparatus and heat treatment method1 Oct 2026US 2026/0298540 A1Tokyo Electron Limited
- Heater plate with different emissivity for temperature uniformity17 Sep 2026US 2026/0282805 A1ASM IP Holding B. V.
- Sealing structure for furnace tube, and furnace tube10 Sep 2026US 2026/0266548 A1Changzhou S.C Exact Equipment Co., Ltd.
- Firing furnace3 Sep 2026US 2026/0259004 A1Orotig S.P.A.
- Ovens for equipment such as die attach systems, flip chip bonding systems, clip attach systems, and related methods6 Aug 2026US 2026/0225171 A1Kulicke and Soffa Industries, Inc.
Most cited
By later US patents
- Movable core fast cool-down furnace577US 4,753,192 ABTU Engineering Corporation · 1988
- Thermal process station with heated lid553US 6,884,066 B2FSI International, Inc. · 2005
- Susceptor heater shim529US 9,202,727 B2ASM IP Holding B. V. · 2015
- Substrate heat treatment apparatus491US 7,432,476 B2Dainippon Screen Mfg.Co., Ltd. · 2008
- Apparatus and method for pre-baking substrate upstream of process chamber476US 9,349,620 B2ASM IP Holdings B.V. · 2016