High pressure heat treatment apparatus

A high pressure heat treatment apparatus, the apparatus comprising:

• an internal chamber configured to accommodate an object to be heat-treated;
• an external chamber including a housing and a partition plate partitioning the housing into a high-temperature zone accommodating the internal chamber and a low-temperature zone configured to have a lower temperature than the high-temperature zone, the partition plate including a discharge hole through which the high-temperature zone and the low-temperature zone communicate with each other, the discharge hole being located in the partition plate at a height above the high-temperature zone;
• a gas supply module configured to supply a process gas for the heat treatment to the internal chamber at a first pressure higher than that of the atmosphere, and supply a protective gas to the external chamber at a second pressure set in relation to the first pressure;
• and
• a discharge module including a hole cover positioned to correspond to the discharge hole and a driving unit configured to move the hole cover between a closing position for closing the discharge hole and an opening position for opening the discharge hole to discharge the protective gas in the high-temperature zone to the low-temperature zone.