Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and non-transitory computer-readable recording medium

A substrate processing apparatus comprising:

• a process chamber in which a substrate is processed;
• a microwave generator configured to be capable of supplying a microwave into the process chamber with an output preset level of the microwave;
• an operator configured to be capable of setting a plurality of correction coefficients for correcting an output level of the microwave;
• a memory configured to be capable of storing a plurality of correction tables in which the plurality of correction coefficients set by the operator are written;
• and
• an operation processor configured to be capable of performing:
• (a) acquiring one or more correction coefficients from at least one correction table among the plurality of correction tables periodically from a start of outputting of the microwave;
• (b) calculating a correction value for the output preset level of the microwave from the one or more correction coefficients acquired in (a);
• and
• (c) correcting the output preset level of the microwave by using the correction value calculated in (b),
• wherein the plurality of correction coefficients comprise a first correction coefficient for a slope of the output level of the microwave and a second correction coefficient for an offset value of the output level of the microwave,
• wherein the plurality of correction tables comprise an inter-apparatus machine difference correction table configured such that the first correction coefficient and the second correction coefficient are capable of being set,
• wherein the plurality of correction tables further comprise at least one selected from the group of an inter-process-module correction table and an inter-process correction table, and the plurality of correction coefficients comprise a third correction coefficient for the slope of the output level of the microwave, a fourth correction coefficient for the offset value of the output level of the microwave and a fifth correction coefficient for the offset value of the output level of the microwave,
• wherein the inter-process-module correction table is configured such that the third correction coefficient and the fourth correction coefficient are capable of being set for each elapsed time from the start of the outputting of the microwave in the inter-process-module correction table,
• wherein the inter-process correction table is configured such that the fifth correction coefficient is capable of being set for each elapsed time from the start of the outputting of the microwave in the inter-process correction table, and
• wherein, in (d), the correction value for the output preset level of the microwave is calculated based on the first correction coefficient and the second correction coefficient acquired from the inter-apparatus machine difference correction table and at least one selected from the group of the third correction coefficient or the fourth correction coefficient acquired from the inter-process-module correction table and the fifth correction coefficient acquired from the inter-process correction table.

A non-transitory computer-readable recording medium storing a program that causes, by a computer, a substrate processing apparatus to perform:

• (a) setting a plurality of correction coefficients for correcting an output level of a microwave;
• (b) storing a plurality of correction tables in which the plurality of correction coefficients set in (a) are written;
• (c) acquiring one or more correction coefficients from at least one correction table among the plurality of correction tables periodically from a start of outputting of the microwave;
• (d) calculating a correction value for an output preset level of the microwave from the one or more correction coefficients acquired in (c);
• (e) correcting the output preset level of the microwave by using the correction value calculated in (d);
• and
• (f) processing a substrate by supplying the microwave into a process chamber with the output preset level of the microwave corrected in (e),
• wherein the plurality of correction coefficients comprise a first correction coefficient for a slope of the output level of the microwave and a second correction coefficient for an offset value of the output level of the microwave,
• wherein the plurality of correction tables comprise an inter-apparatus machine difference correction table configured such that the first correction coefficient and the second correction coefficient are capable of being set,
• wherein the plurality of correction tables further comprise at least one selected from the group of an inter-process-module correction table and an inter-process correction table, and the plurality of correction coefficients comprise a third correction coefficient for the slope of the output level of the microwave, a fourth correction coefficient for the offset value of the output level of the microwave and a fifth correction coefficient for the offset value of the output level of the microwave,
• wherein the inter-process-module correction table is configured such that the third correction coefficient and the fourth correction coefficient are capable of being set for each elapsed time from the start of the outputting of the microwave in the inter-process-module correction table,
• wherein the inter-process correction table is configured such that the fifth correction coefficient is capable of being set for each elapsed time from the start of the outputting of the microwave in the inter-process correction table, and
• wherein, in (d), the correction value for the output preset level of the microwave is calculated based on the first correction coefficient and the second correction coefficient acquired from the inter-apparatus machine difference correction table and at least one selected from the group of the third correction coefficient or the fourth correction coefficient acquired from the inter-process-module correction table and the fifth correction coefficient acquired from the inter-process correction table.