Ovens for equipment such as die attach systems, flip chip bonding systems, clip attach systems, and related methods
AssigneeKulicke and Soffa Industries, Inc.
InventorChristoph Benno Luechinger
Life of this patent
Estimating the term…
Abstract
An oven for assisting in conductive joint formation related to a workpiece is provided. The oven includes a vacuum chamber. The vacuum chamber is configured to receive the workpiece. The vacuum chamber includes (i) a body portion and (ii) a cover configured to cover the body portion. The body portion defines a groove configured to receive a sealing structure for creating a seal between the cover and the body portion. The body portion defines a cooling channel configured to receive a cooling fluid for cooling the groove.
Claims21
An oven for assisting in conductive joint formation related to a workpiece, the oven comprising:
- a vacuum chamber, the vacuum chamber configured to receive the workpiece, the vacuum chamber including (i) a body portion and (ii) a cover configured to cover the body portion,
- the body portion defining a groove configured to receive a sealing structure for creating a seal between the cover and the body portion, the body portion defining a cooling channel configured to receive a cooling fluid for cooling the groove.
An oven for assisting in conductive joint formation related to a workpiece, the oven comprising:
- a vacuum chamber, the vacuum chamber configured to receive the workpiece, the vacuum chamber including (i) a body portion and (ii) a cover configured to cover the body portion;
- a motion system configured to move the cover with respect to the body portion between an open position and a closed position;
- and
- a vacuum source configured to pull a vacuum in the vacuum chamber, the vacuum source sealing the cover against the body portion when the cover is in the closed position.
An oven for assisting in conductive joint formation related to a workpiece, the oven comprising:
- a vacuum chamber, the vacuum chamber configured to receive the workpiece, the vacuum chamber including (i) a body portion and (ii) a cover configured to cover the body portion;
- and
- a flux removal system for removing flux from the vacuum chamber.
-48. (canceled)
Dependencies are inferred from the claim text.