C30B 31/12
Heating of the reaction chamber
C30B31/12 (Heating of the reaction chamber) appears on 203 US grants and 51 published applications in this corpus.
Search patents in C30B- Granted patents
- 203
- Published applications
- 51
- Assignees
- 79
- Inventors
- 323
- Latest grant
- 23 Sep 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 2 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 4 | 0 |
| 1986 | 1 | 0 |
| 1987 | 3 | 0 |
| 1988 | 0 | 0 |
| 1989 | 5 | 0 |
| 1990 | 9 | 0 |
| 1991 | 5 | 0 |
| 1992 | 6 | 0 |
| 1993 | 4 | 0 |
| 1994 | 7 | 0 |
| 1995 | 10 | 0 |
| 1996 | 9 | 0 |
| 1997 | 19 | 0 |
| 1998 | 16 | 0 |
| 1999 | 12 | 0 |
| 2000 | 23 | 0 |
| 2001 | 12 | 3 |
| 2002 | 16 | 11 |
| 2003 | 5 | 5 |
| 2004 | 2 | 5 |
| 2005 | 6 | 4 |
| 2006 | 3 | 3 |
| 2007 | 1 | 2 |
| 2008 | 4 | 3 |
| 2009 | 0 | 1 |
| 2010 | 1 | 0 |
| 2011 | 2 | 2 |
| 2012 | 1 | 2 |
| 2013 | 0 | 0 |
| 2014 | 2 | 1 |
| 2015 | 0 | 0 |
| 2016 | 0 | 1 |
| 2017 | 0 | 1 |
| 2018 | 1 | 1 |
| 2019 | 0 | 0 |
| 2020 | 1 | 2 |
| 2021 | 2 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 0 |
| 2024 | 0 | 0 |
| 2025 | 1 | 3 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Methods of preparation of organometallic halide structures2 Apr 2020US 2020/0102666 A1King Abdullah University of Science and Technology
Most cited
By later US patents
- Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween832US 5,781,693 AAPPLIED Materials.Inc. · 1998
- Rapid thermal processing apparatus for processing semiconductor wafers624US 5,444,217 AMoore Epitaxial, Inc. · 1995
- Method and apparatus for controlling temperature in rapid heat treatment system520US 5,616,264 ATokyo Electron Limited · 1997
- Temperature control system for a thermal reactor499US 6,441,350 B1Brooks Automation, Inc. · 2002
- Semiconductor processing furnace490US 5,947,718 ASemitool, Inc. · 1999