C23C 16/56
After-treatment
C23C16/56 (After-treatment) appears on 2,719 US grants and 3,666 published applications in this corpus.
Search patents in C23C- Granted patents
- 2,719
- Published applications
- 3,666
- Assignees
- 1,037
- Inventors
- 7,322
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 3 | 0 |
| 1986 | 1 | 0 |
| 1987 | 11 | 0 |
| 1988 | 4 | 0 |
| 1989 | 7 | 0 |
| 1990 | 9 | 0 |
| 1991 | 5 | 0 |
| 1992 | 4 | 0 |
| 1993 | 9 | 0 |
| 1994 | 16 | 0 |
| 1995 | 14 | 0 |
| 1996 | 14 | 0 |
| 1997 | 24 | 0 |
| 1998 | 27 | 0 |
| 1999 | 40 | 0 |
| 2000 | 56 | 0 |
| 2001 | 57 | 27 |
| 2002 | 56 | 78 |
| 2003 | 65 | 93 |
| 2004 | 66 | 92 |
| 2005 | 56 | 100 |
| 2006 | 50 | 103 |
| 2007 | 57 | 89 |
| 2008 | 40 | 85 |
| 2009 | 59 | 97 |
| 2010 | 63 | 95 |
| 2011 | 76 | 96 |
| 2012 | 75 | 108 |
| 2013 | 62 | 79 |
| 2014 | 68 | 92 |
| 2015 | 91 | 122 |
| 2016 | 68 | 159 |
| 2017 | 117 | 172 |
| 2018 | 129 | 181 |
| 2019 | 134 | 193 |
| 2020 | 151 | 203 |
| 2021 | 138 | 204 |
| 2022 | 130 | 261 |
| 2023 | 154 | 282 |
| 2024 | 169 | 220 |
| 2025 | 190 | 268 |
| 2026 | 146 | 167 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Filling method and film forming apparatus6 Oct 2026US 12,753,491 B2Tokyo Electron Limited
- Method of forming silicon carbide conversion coat on carbon using gas phase reactions6 Oct 2026US 12,753,492 B2Goodrich Corporation
- Method of manufacturing a redistribution layer, redistribution layer, integrated circuit and methods for electrically testing and protecting the integrated circuit6 Oct 2026US 12,753,493 B2STMicroelectronics S,r.l.
- Methods of growing metal-containing films6 Oct 2026US 12,753,498 B2APPLIED Materials.Inc.
- Treating silicon nitride based dielectric films6 Oct 2026US 12,757,657 B2APPLIED Materials.Inc.
- Cultivating methods and apparatuses8 Oct 2026US 2026/0305597 A1
- Hydrophilic antimicrobial diamond coating8 Oct 2026US 2026/0308049 A1United States Department of Energy
- Process for improving flash sintering of ceramics and improved ceramics8 Oct 2026US 2026/0308072 A1The Regents of the University of Colorado, a body corporate
- Substrate processing method and substrate processing system8 Oct 2026US 2026/0308752 A1Tokyo Electron Limited
- Device and method for mist chemical vapor deposition of large-size semiconductor thin film8 Oct 2026US 2026/0308759 A1Tiangong University
Most cited
By later US patents
- Method and system for improving dielectric film quality for void free gap fill649US 7,541,297 B2APPLIED Materials.Inc. · 2009
- Process for forming a low dielectric constant carbon-containing film647US 6,632,478 B2APPLIED Materials.Inc. · 2003
- Method to form ultra high quality silicon-containing compound layers618US 7,297,641 B2ASM America, Inc. · 2007
- Ultraviolet curing processes for advanced low-k materials617US 6,756,085 B2Axcelis Technologies, Inc. · 2004
- Nanolayer thick film processing system and method617US 6,756,318 B2Tegal Corporation · 2004