C23C 16/513
Using plasma jets
Official title: using plasma jets
C23C16/513 (Using plasma jets) appears on 405 US grants and 497 published applications in this corpus.
Search patents in C23C- Granted patents
- 405
- Published applications
- 497
- Assignees
- 293
- Inventors
- 1,189
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 2 | 0 |
| 1982 | 0 | 0 |
| 1983 | 2 | 0 |
| 1984 | 5 | 0 |
| 1985 | 2 | 0 |
| 1986 | 0 | 0 |
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 8 | 0 |
| 1993 | 14 | 0 |
| 1994 | 12 | 0 |
| 1995 | 10 | 0 |
| 1996 | 9 | 0 |
| 1997 | 5 | 0 |
| 1998 | 4 | 0 |
| 1999 | 4 | 0 |
| 2000 | 9 | 0 |
| 2001 | 6 | 3 |
| 2002 | 13 | 10 |
| 2003 | 4 | 8 |
| 2004 | 8 | 17 |
| 2005 | 7 | 10 |
| 2006 | 2 | 14 |
| 2007 | 9 | 7 |
| 2008 | 5 | 19 |
| 2009 | 5 | 12 |
| 2010 | 8 | 19 |
| 2011 | 5 | 14 |
| 2012 | 6 | 20 |
| 2013 | 6 | 21 |
| 2014 | 13 | 34 |
| 2015 | 12 | 34 |
| 2016 | 14 | 28 |
| 2017 | 26 | 30 |
| 2018 | 24 | 31 |
| 2019 | 24 | 25 |
| 2020 | 17 | 15 |
| 2021 | 16 | 26 |
| 2022 | 9 | 15 |
| 2023 | 13 | 40 |
| 2024 | 17 | 23 |
| 2025 | 33 | 13 |
| 2026 | 9 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Remote plasma deposition with electrostatic clamping6 Oct 2026US 12,757,682 B2Lam Research Corporation
- Method for coating metal2 Jun 2026US 12,644,177 B2Agc Glass Europe
- Spray nozzle device19 May 2026US 12,629,703 B2Applied Plasma Inc Co., Ltd.
- Arc-beam scanning for suppressing anode overgrowth in PICVD system19 May 2026US 12,633,502 B2Oerlikon Surface Solutions AG, PfäFfikon
- Atmospheric pressure plasma reduction of copper oxide to copper metal5 May 2026US 12,617,146 B1Surfx Technologies LLC
- Multilayer coating for high stressed metal pieces17 Sep 2026US 2026/0275531 A1Nuovo Pignone Tecnologie Srl
- Hydrophobic and oleophobic film layer, and method for preparing the same16 Jul 2026US 2026/0201177 A1Jiangsu Favored Nanotechnology Co., Ltd.
- Coherent or pristine graphene in a polymer matrix16 Jul 2026US 2026/0201532 A1Lyten, Inc.
- Hydrophobic and oleophobic film layer, and method for preparing the same9 Jul 2026US 2026/0192331 A1Jiangsu Favored Nanotechnology Co., Ltd.
- Methods and systems for plasma colouration and pigment fixation30 Apr 2026US 2026/0117458 A1Xefco Pty Ltd
Most cited
By later US patents
- Dual plasma beam sources and method560US 7,411,352 B2Applied Process Technologies, Inc. · 2008
- Method for microwave plasma assisted supersonic gas jet deposition of thin films519US 5,356,672 AJet Process Corporation · 1994
- Enhanced deposition of layer on substrate using radicals345US 9,163,310 B2Veeco ALD Inc. · 2015
- Atomic layer deposition using radicals of gas mixture343US 8,877,300 B2Veeco ALD Inc. · 2014
- Method for arc discharge plasma vapor deposition of diamond293US 5,368,897 AFujitsu Limited · 1994