Spray nozzle device
AssigneeApplied Plasma Inc Co., Ltd.
InventorsJae Beom Park, In Ho Choi
Life of this patent
Estimating the term…
Abstract
A spray nozzle device according to an embodiment includes a first nozzle having a first spray hole for spraying plasma, a second nozzle spaced apart from the first nozzle and having at least one second spray hole through which the plasma sprayed from the first nozzle passes, a coupling member spaced apart from the second nozzle and coupled to the first nozzle, and at least one connecting member connecting the second nozzle with the coupling member. The second nozzle includes at least one inflow channel for the injection of a deposition material into the second spray hole.
Claims9
A spray nozzle device comprising:
- a first nozzle having a first spray hole for spraying plasma;
- a second nozzle spaced apart from the first nozzle, the second nozzle having at least one second spray hole through which the plasma sprayed from the first nozzle passes, the second nozzle including at least one inflow channel for injection of a deposition material into the at least one second spray hole;
- a coupling member spaced apart from the second nozzle and coupled to the first nozzle;
- and
- at least one connecting member connecting the second nozzle with the coupling member,
- wherein the connecting member comprises a pair of connecting members, and the second nozzle includes:
- an insertion portion into which one of the pair of connecting members is inserted;
- and
- a rail portion having an arc shape that is spaced apart from the insertion portion and into which remaining one of the connecting members is inserted,
- and wherein the connecting member inserted into the rail portion is configured to move along the rail portion to move the first nozzle clockwise or counterclockwise.
A spray nozzle device comprising:
- a first nozzle having a first spray hole for spraying plasma;
- a second nozzle spaced apart from the first nozzle, the second nozzle including a guide channel for changing a spray direction of the plasma sprayed from the first nozzle and at least one inflow channel for injection of a deposition material into the guide channel, a coupling member spaced apart from the second nozzle and coupled to the first nozzle;
- and at least one connecting member connecting the second nozzle with the coupling member;
- and
- wherein the connecting member comprises a pair of connecting members, the second nozzle including an insertion portion into which one of the pair of connecting members is inserted and a rail portion having an arc shape that is spaced apart from the insertion portion and into which remaining one of the connecting members is inserted,
- wherein a longitudinal direction of the guide channel is inclined with respect to the spray direction of the first nozzle,
- and wherein the connecting member inserted into the rail portion is configured to move along the rail portion to move the first nozzle clockwise or counterclockwise.
Dependencies are inferred from the claim text.