C23C 16/0263
Irradiation with laser or particle beam
Official title: {Irradiation with laser or particle beam}
C23C16/0263 (Irradiation with laser or particle beam) appears on 54 US grants and 60 published applications in this corpus.
Search patents in C23C- Granted patents
- 54
- Published applications
- 60
- Assignees
- 60
- Inventors
- 186
- Latest grant
- 17 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 5 | 0 |
| 1999 | 4 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 1 |
| 2002 | 0 | 0 |
| 2003 | 1 | 0 |
| 2004 | 0 | 1 |
| 2005 | 1 | 0 |
| 2006 | 0 | 1 |
| 2007 | 0 | 1 |
| 2008 | 0 | 2 |
| 2009 | 1 | 2 |
| 2010 | 1 | 1 |
| 2011 | 0 | 2 |
| 2012 | 1 | 2 |
| 2013 | 3 | 3 |
| 2014 | 2 | 1 |
| 2015 | 3 | 6 |
| 2016 | 0 | 4 |
| 2017 | 2 | 2 |
| 2018 | 2 | 4 |
| 2019 | 3 | 2 |
| 2020 | 3 | 4 |
| 2021 | 1 | 3 |
| 2022 | 1 | 1 |
| 2023 | 3 | 9 |
| 2024 | 3 | 3 |
| 2025 | 2 | 4 |
| 2026 | 2 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Electrochemical reduction of surface metal oxides17 Feb 2026US 12,553,129 B2APPLIED Materials.Inc.
- Laser-enhanced chemical vapor deposition10 Feb 2026US 12,548,965 B2River Electro Optics, LLC
- Plasma-enhanced chemical vapor deposition for structurally-complex substrates23 Dec 2025US 12,505,981 B2
- Method for plasma-assisted and multi-step continuous preparation of diffusion layer/amorphous carbon film composite coating and use thereof24 Jun 2025US 12,340,982 B2Anhui University of Technology
- Area selective nanoscale-thin layer deposition via precise functional group lithography4 Jun 2024US 12,000,037 B2The Curators of the University of Missouri
- Film formation method and film formation apparatus1 Oct 2026US 2026/0297728 A1Tokyo Electron Limited
- Electrochemical reduction of surface metal oxides30 Oct 2025US 2025/0336665 A1APPLIED Materials.Inc.
- Surface treatment methods and systems, and surface-treated articles19 Jun 2025US 2025/0197989 A1Aspen Hybrid Technology Systems
- Corrosion-resistant member production method and laser cvd device27 Mar 2025US 2025/0101591 A1Nippon Light Metal Company, Ltd.
- Determination method and substrate processing apparatus27 Feb 2025US 2025/0067664 A1Tokyo Electron Limited
Most cited
By later US patents
- Diamond films and method of growing diamond films on nondiamond substrates129US 5,082,359 AEpion Corporation · 1992
- Method of processing films prior to chemical vapor deposition using electron beam processing72US 6,548,899 B2Electron Vision Corporation · 2003
- Synthetic diamond coatings with intermediate amorphous metal bonding layers and methods of applying such coatings56US 6,083,570 A2000
- Method of applying a laser beam creating micro-scale surface structures prior to deposition of film for increased adhesion53US 5,558,789 AUniversity of Florida · 1996
- Method and system for coating internal surfaces using reverse-flow cycling52US 7,541,069 B2Sub-One Technology, Inc. · 2009