Laser-enhanced chemical vapor deposition
AssigneeRiver Electro Optics, LLC
InventorsRodney S. Harris, Stephen G. Topping
Life of this patent
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Abstract
A laser-enhanced chemical vapor deposition transport system includes a resistive heated crucible and, projecting from the crucible at a first end, a plurality of spokes. The spokes are configured to deliver, substantially simultaneously, vaporized and/or sublimated media powder from the crucible to a plurality of deposition sites, deliver precursor gasses to the deposition sites and propagate beams emitted from one or more laser sources to the deposition sites.
Claims19
A laser-enhanced chemical vapor deposition reactor, comprising:
- a plurality of laser sources;
- a resistive-heated crucible;
- and
- a plurality of spokes each projecting from the crucible from a first end and including:
- at least one precursor gas bore configured to carry precursor gasses to a second end distal from the first end;
- at least one media vapor bore configured to carry media vapor from the crucible to the second end;
- a laser beam light pipe configured to propagate a beam emitted from the laser sources to the second end;
- a spreader lens at the second end configured to condition the beam into a divergent beam and;
- provided by a metal rod inserted from the first end, an angled mirror interface between one of the laser sources and the laser beam light pipe.
A laser-enhanced chemical vapor deposition transport system, comprising:
- a resistive heated crucible;
- and
- projecting from the crucible at a first end, a plurality of spokes configured to substantially simultaneously:
- deliver media powder vapor from the crucible to a plurality of deposition sites;
- deliver precursor gasses to the deposition sites;
- and
- propagate beams emitted from one or more laser sources to the deposition sites.
A method for laser-enhanced chemical vapor deposition, comprising:
- providing a resistive heated crucible having a plurality of spokes each projecting from a first end coupled with the crucible to a second end remote from the crucible;
- positioning the second ends of the spokes adjacent to deposition sites of a ring substrate;
- heating media in the crucible to vaporization and/or sublimation;
- transporting the heated media from the crucible through media vapor bores of the spokes to the second ends of the spokes with inert carrier gas;
- combining the heated media with precursor gasses adjacent to the deposition sites of the ring substrate;
- transporting the combination to the deposition sites of the ring substrate through second ends of the spokes;
- irradiating the deposition sites by a laser source conditioned into divergent beams by spreader lenses adjacent to the spoke second ends;
- and
- coating the deposition sites of the ring substrate with the media.
Dependencies are inferred from the claim text.