C23C 14/547
Using optical methods
Official title: {using optical methods}
C23C14/547 (Using optical methods) appears on 160 US grants and 192 published applications in this corpus.
Search patents in C23C- Granted patents
- 160
- Published applications
- 192
- Assignees
- 133
- Inventors
- 511
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 2 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 3 | 0 |
| 1987 | 3 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 2 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 3 | 0 |
| 1999 | 4 | 0 |
| 2000 | 8 | 0 |
| 2001 | 3 | 2 |
| 2002 | 7 | 15 |
| 2003 | 8 | 6 |
| 2004 | 7 | 10 |
| 2005 | 8 | 6 |
| 2006 | 3 | 8 |
| 2007 | 5 | 5 |
| 2008 | 3 | 7 |
| 2009 | 1 | 7 |
| 2010 | 2 | 7 |
| 2011 | 0 | 6 |
| 2012 | 4 | 1 |
| 2013 | 0 | 5 |
| 2014 | 4 | 7 |
| 2015 | 4 | 5 |
| 2016 | 5 | 11 |
| 2017 | 4 | 6 |
| 2018 | 2 | 6 |
| 2019 | 9 | 6 |
| 2020 | 1 | 7 |
| 2021 | 4 | 12 |
| 2022 | 5 | 9 |
| 2023 | 7 | 13 |
| 2024 | 10 | 19 |
| 2025 | 10 | 5 |
| 2026 | 4 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Tubular sputter cathode29 Sep 2026US 12,747,491 B2BüHler Alzenau GmbH
- Cylindric decomposition for efficient mitigation of substrate deformation with film deposition and ion implantation29 Sep 2026US 12,751,253 B2APPLIED Materials.Inc.
- Film formation control device, film formation device and film formation method14 Jul 2026US 12,680,157 B2Shincron Co., Ltd.
- Anti-stick coatings including fluorophores19 May 2026US 12,629,198 B2Gyrus ACMI, Inc.
- Apparatus for continuously measuring thickness of thin material, method for continuously measuring thickness of thin material using same, and method for manufacturing high-temperature superconducting wire using same2 Dec 2025US 12,487,078 B2Korean Electrotechnology Research Institute
- Method, control device, computer program and storage medium30 Apr 2026US 2026/0117367 A1Von Ardenne Asset GmbH & Co. KG
- Tubular Sputter Cathode13 Nov 2025US 2025/0346990 A1BüHler Alzenau GmbH
- Apparatus for continuously measuring thickness of thin material, method for continuously measuring thickness of thin material using same, and method for manufacturing high-temperature superconducting wire using same30 Oct 2025US 2025/0334398 A1Korea Electrotechhology Research Institute
- System and method to map thickness variations of substrates in manufacturing systems10 Jul 2025US 2025/0224228 A1APPLIED Materials.Inc.
- Apparatus for continuously measuring thickness of thin material, method for continuously measuring thickness of thin material using same, and method for manufacturing high-temperature superconducting wire using same16 Jan 2025US 2025/0020451 A1Korea Electrotechnology Research Institute
Most cited
By later US patents
- Method and system for adjusting semiconductor processing equipment412US 6,126,744 AASM America, Inc. · 2000
- Ellipsometric control of material growth168US 5,091,320 ABell Communications Research, Inc. · 1992
- Cell control method and apparatus96US 6,161,054 AOn-Line Technologies, Inc. · 2000
- Thin film forming apparatus using laser69US 5,622,567 AMitsubishi Denki Kabushiki Kaisha · 1997
- Method and apparatus for process endpoint prediction based on actual thickness measurements67US 5,503,707 ATexas Instruments Incorporated · 1996