Method, control device, computer program and storage medium
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorBernd Galonska
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Abstract
According to various embodiments, a method can comprise: determining an actual state of a result of a two-sided coating process, by means of which a first layer stack is formed on a front side of a substrate and a second layer stack is formed on a rear side of the substrate, on the basis of: a model, which implements a link between the result and a spectral response of the result, and an actual state of the spectral response, an indication of the difference between a first sub-process of the coating process, by means of which the first layer stack is formed, and a simultaneous second sub-process of the coating process, by means of which the second layer stack is formed, and controlling the coating process on the basis of the actual state of the result.
Claims32
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A method, comprising:
- determining an actual state of a result of a two-sided coating process, by which a first layer stack is formed on a front side of a substrate and a second layer stack is formed on a back side of the substrate, based on:
- a model that implements a correlation between the result and a spectral response of the result;
- and,
- an actual state of the spectral response;
- information about a difference between a first sub-process of the coating process, by which the first layer stack is formed;
- and,
- a simultaneous second sub-process of the coating process, by which the second layer stack is formed, controlling the coating process based on the actual state of the result.
A non-volatile computer readable medium storing instructions configured, when executed by a processor, to cause the processor to perform the following:
- determining an actual state of a result of a two-sided coating process by which a first layer stack is formed on a front side of a substrate and a second layer stack is formed on a back side of the substrate, based on:
- a model that implements a correlation between the result and a spectral response of the result;
- and,
- an actual state of the spectral response;
- and,
- information about a difference between a first sub-process of the coating process, by which the first layer stack is formed, and a simultaneous second sub-process of the coating process, by which the second layer stack is formed, controlling the coating process based on the actual state of the result.
A control device comprising one or more than one processor adapted to perform the following:
- determining an actual state of a result of a two-sided coating process by which a first layer stack is formed on a front side of a substrate and a second layer stack is formed on a back side of the substrate, based on:
- a model that implements a correlation between the result and a spectral response of the result;
- and,
- an actual state of the spectral response;
- and,
- information about a difference between a first sub-process of the coating process, by which the first layer stack is formed, and a simultaneous second sub-process of the coating process, by which the second layer stack is formed, controlling the coating process based on the actual state of the result.
Dependencies are inferred from the claim text.