B81C 2201/056
Releasing structures at the end of the manufacturing process
B81C2201/056 (Releasing structures at the end of the manufacturing process) appears on 66 US grants and 68 published applications in this corpus.
Search patents in B81C- Granted patents
- 66
- Published applications
- 68
- Assignees
- 47
- Inventors
- 160
- Latest grant
- 4 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 3 | 4 |
| 2003 | 2 | 3 |
| 2004 | 2 | 2 |
| 2005 | 3 | 2 |
| 2006 | 1 | 3 |
| 2007 | 1 | 0 |
| 2008 | 2 | 1 |
| 2009 | 0 | 3 |
| 2010 | 0 | 3 |
| 2011 | 1 | 0 |
| 2012 | 2 | 0 |
| 2013 | 2 | 1 |
| 2014 | 1 | 2 |
| 2015 | 2 | 3 |
| 2016 | 6 | 7 |
| 2017 | 5 | 8 |
| 2018 | 6 | 6 |
| 2019 | 7 | 3 |
| 2020 | 4 | 0 |
| 2021 | 1 | 3 |
| 2022 | 2 | 2 |
| 2023 | 2 | 3 |
| 2024 | 2 | 4 |
| 2025 | 1 | 2 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS device manufacturing method4 Aug 2026US 12,698,203 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Foundry-compatible through silicon via process for integrated micro-speaker and microphone6 Jan 2026US 12,515,943 B2Vibrant Microsystems Inc.
- Top notch slit profile for MEMS device25 Feb 2025US 12,238,478 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Electrically functional polymer microneedle array27 Aug 2024US 12,070,307 B2International Business Machines Corporation
- Microelectromechanical microphone with membrane trench reinforcements and method of fabrication18 Jun 2024US 12,012,326 B2TDK Corporation
- Method for singulating a wafer and suitable device21 May 2026US 2026/0138869 A1Carl Zeiss SMT GmbH
- Device encapsulation using physical vapor deposition5 Feb 2026US 2026/0035238 A1
- Method for producing a mems mirror array, and mems mirror array15 Jan 2026US 2026/0015226 A1
- Top notch slit profile for mems device9 Oct 2025US 2025/0317694 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Foundry-compatible through silicon via process for integrated micro-speaker and microphone20 Feb 2025US 2025/0059023 A1Vibrant Microsystems Inc.
Most cited
By later US patents
- Method of fabricating suspended microstructures245US 6,465,355 B1Hewlett-Packard Company · 2002
- Encapsulants for protecting MEMS devices during post-packaging release etch116US 6,956,283 B12005
- Nucleation control of diamond films by microlithographic patterning80US 5,242,711 ARockwell International Corporation · 1993
- Method of making a micromechanical electric shunt72US 4,674,180 AThe Foxboro Company · 1987
- Electromechanical element, electric circuit device and production method of those35US 8,142,669 B2Sony Corporation · 2012