Electrically functional polymer microneedle array

A method of fabrication of a sensor device, the method comprising:

• patterning electrically conductive material layers onto a sacrificial layer to form an inverse pattern;
• complementarily patterning a polymer substrate onto the electrically conductive material layers to form a set of microneedles according to the inverse pattern, whereby each of the microneedles extends from a base surface of the substrate, wherein the polymer substrate is structured so as to exhibit a set of vias that extend, each, through a thickness of the polymer substrate, thereby forming a corresponding set of apertures on said base surface, and wherein each of the apertures is adjacent to a respective one of the microneedles formed;
• and
• removing the sacrificial layer, to release the polymer substrate with the electrically conductive material layers formed thereon, to obtain a sensor device having electrodes formed by said material layers on at least some of the microneedles and neighboring portions of the base surface of the substrate.

A method of analysis of a fluid, the method comprising:

• providing a sensor device comprising:
• a polymer substrate structured so as to form:
• a set of microneedles that extend, each, from a base surface of the substrate;
• and
• a set of vias extending, each, through a thickness of the substrate, thereby forming a corresponding set of apertures on said base surface, wherein each of the apertures is adjacent to a respective one of the microneedles;
• and
• two electrodes, including a sensing electrode and a reference electrode, each comprising an electrically conductive material layer that coats a region of the substrate, so as to coat at least some of the microneedles and neighboring portions of said base surface,
• applying the polymer substrate on a body for the microneedles to penetrate into the body and to allow a fluid from the body to contact an exposed surface of the electrodes, and
• reading signals obtained from the electrodes.