B81C 2201/0164
By doping the layer
Official title: by doping the layer
B81C2201/0164 (By doping the layer) appears on 27 US grants and 21 published applications in this corpus.
Search patents in B81C- Granted patents
- 27
- Published applications
- 21
- Assignees
- 27
- Inventors
- 75
- Latest grant
- 14 Oct 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 2 | 3 |
| 2003 | 4 | 4 |
| 2004 | 1 | 3 |
| 2005 | 2 | 0 |
| 2006 | 1 | 1 |
| 2007 | 2 | 0 |
| 2008 | 1 | 0 |
| 2009 | 0 | 1 |
| 2010 | 1 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 1 |
| 2013 | 1 | 1 |
| 2014 | 1 | 0 |
| 2015 | 1 | 0 |
| 2016 | 0 | 0 |
| 2017 | 1 | 0 |
| 2018 | 0 | 0 |
| 2019 | 1 | 1 |
| 2020 | 1 | 0 |
| 2021 | 0 | 0 |
| 2022 | 0 | 0 |
| 2023 | 1 | 1 |
| 2024 | 1 | 2 |
| 2025 | 1 | 2 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Non-lid-bonded MEMS resonator with phosphorus dopant14 Oct 2025US 12,445,107 B2SiTime Corporation
- MEMS resonator with colocated temperature sensor17 Sep 2024US 12,095,447 B1
- MEMS resonator with co-located temperature sensor26 Sep 2023US 11,770,112 B1SiTime Corporation
- Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatus24 Mar 2020US 10,596,581 B2Ricoh Company, Ltd.
- Dual-resonator semiconductor die12 Nov 2019US 10,476,477 B1SiTime Corporation
- MEMS Resonator9 Apr 2026US 2026/0100692 A1SiTime Corporation
- Monolithic Microelectromechanical Systems Based Spatial Light Modulators Including Ribbon-Type Modulators23 Oct 2025US 2025/0326629 A1Silicon Light Machines Corporation
- Monolithic Microelectromechanical Systems Based Spatial Light Modulators with Two-dimensional Modulators2 Oct 2025US 2025/0304432 A1Silicon Light Machines Corporation
- Low voltage capacitive micromachined ultrasonic transducer (cmut) design and manufacturing flow26 Dec 2024US 2024/0425365 A1Sensonics Transducers Private Limited
- Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant15 Feb 2024US 2024/0056054 A1SiTime Corporation
Most cited
By later US patents
- Silicon membrane with controlled stress75US 5,110,373 ANanostructures, Inc. · 1992
- Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor74US 6,522,801 B1Agere Systems Inc. · 2003
- Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body72US 5,922,212 ANippondenso Co., Ltd. · 1999
- Method for forming a silicon membrane with controlled stress58US 4,966,663 ANanostructures, Inc. · 1990
- Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof34US 8,558,643 B2Teknologian tutkimuskeskus VTT Oy · 2013