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US 10,596,581 B2Granted
Actuator, liquid discharge head, liquid discharge device, and liquid discharge apparatus
AssigneeRicoh Company, Ltd.
InventorSatoshi Mizukami
Life of this patent
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Abstract
An actuator includes a diaphragm, a lower electrode on the diaphragm, an electromechanical transducer film on the lower electrode, and an upper electrode on the electromechanical transducer film. The diaphragm includes a first silicon oxide film having a thickness of 0.5 μm or more, a silicon layer on the first silicon oxide film, a thickness of which is 3 μm or more, and a second silicon oxide film on the silicon layer, a thickness of which is 0.5 μm or more. A volume resistivity of the silicon layer is 103 Ω·cm or more and 106 Ω·cm or less.
Claims16
An actuator comprising:
- a diaphragm;
- a lower electrode on the diaphragm;
- an electromechanical transducer film on the lower electrode;
- and
- an upper electrode on the electromechanical transducer film,
- the diaphragm including:
- a first silicon oxide film having a thickness of 0.5 μm or more;
- a silicon layer on the first silicon oxide film, a thickness of which is 3 μm or more;
- and
- a second silicon oxide film on the silicon layer, a thickness of which is 0.5 μm or more,
- a volume resistivity of the silicon layer being 103Ω˜cm or more and 106 Ω·cm or less.
8 more elements
Dependencies are inferred from the claim text.