Micro-electro-optical mechanical device having an implanted dopant included therein and a method of manufacture therefor
AssigneesAgere Systems Inc., Lucent Technologies Inc.
InventorsVladimir A. Aksyuk, Sungho Jin, Jungsang Kim, Hareesh Mavoori, Flavio Pardo, Ainissa Ramirez
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Abstract
The present invention provides a micro-electro-mechanical system (MEMS) optical device. The micro-electro-mechanical system (MEMS) optical device includes a mirror having a substrate with an implanted light reflective optical layer thereover, and a mounting substrate on which the mirror is movably mounted. The inclusion of the dopant within the light reflective optical layer increases the tensile stress of the device and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
Claims59
A micro-electro-mechanical system (MEMS) optical device, comprising:
- a mirror having a light reflective optical layer containing at least one type of an implanted dopant located over a substrate;
- and
- a mounting substrate on which the mirror is movably mounted.
A method of manufacturing a micro-electro-mechanical system (MEMS) optical device, comprising:
- forming a mirror having a light reflective optical layer containing at least one type of an implanted dopant located over a substrate-;-and
- forming a mounting substrate on which the mirror is movably mounted.
An optical communications system, comprising:
- input/output fiber bundles;
- a micro-electro-mechanical structure, comprising:
- a mirror having a light reflective optical layer containing at least one type of an implanted dopant located over a substrate;
- and
- a mounting substrate on which the mirror is movably mounted;
- imaging lenses interposed between the input/output fiber bundles and the micro-electro-mechanical structure;
- and
- a reflector.
Dependencies are inferred from the claim text.