Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
AssigneeSiTime Corporation
InventorsCharles I. Grosjean, Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Aaron Patridge, Markus Lutz
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Abstract
A microelectromechanical system (MEMS) resonator includes a substrate having a substantially planar surface and a resonant member having sidewalls disposed in a nominally perpendicular orientation with respect to the planar surface. Impurity dopant is introduced via the sidewalls of the resonant member such that a non-uniform dopant concentration profile is established along axis extending between the sidewalls parallel to the substrate surface and exhibits a relative minimum concentration in a middle region of the axis.
Claims1
A microelectromechanical system (MEMS) resonator comprising:
- a substrate having a substantially planar surface;
- and
- a resonant member to oscillate in a mechanical resonance mode and having (i) opposite sidewalls disposed in a nominally perpendicular orientation to the substrate surface, and (ii) a non-uniform dopant concentration profile along an axis extending between the sidewalls parallel to the substrate, the non-uniform dopant concentration profile exhibiting a relative minimum concentration in a middle region of the axis.
Dependencies are inferred from the claim text.