B81C 1/00936
Releasing the movable structure without liquid etchant
Official title: {Releasing the movable structure without liquid etchant}
B81C1/00936 (Releasing the movable structure without liquid etchant) appears on 39 US grants and 36 published applications in this corpus.
Search patents in B81C- Granted patents
- 39
- Published applications
- 36
- Assignees
- 29
- Inventors
- 94
- Latest grant
- 15 Jul 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1997 | 2 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 1 |
| 2002 | 2 | 2 |
| 2003 | 2 | 4 |
| 2004 | 2 | 1 |
| 2005 | 1 | 4 |
| 2006 | 3 | 2 |
| 2007 | 4 | 1 |
| 2008 | 1 | 0 |
| 2009 | 0 | 0 |
| 2010 | 1 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 1 |
| 2013 | 1 | 1 |
| 2014 | 0 | 2 |
| 2015 | 1 | 2 |
| 2016 | 1 | 4 |
| 2017 | 1 | 1 |
| 2018 | 6 | 5 |
| 2019 | 1 | 1 |
| 2020 | 4 | 0 |
| 2021 | 1 | 0 |
| 2022 | 0 | 1 |
| 2023 | 0 | 0 |
| 2024 | 0 | 1 |
| 2025 | 1 | 2 |
By publication year. Applications have been published since 2001.
Recent patents
- Method of manufacturing a microstructure15 Jul 2025US 12,358,784 B2Memsstar Limited
- Micro-electro-mechanical system (MEMS) structures and design structures9 Nov 2021US 11,167,980 B2International Business Machines Corporation
- Method and apparatus for reducing in-process and in-use stiction for MEMS devices22 Dec 2020US 10,870,574 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Micro-electro-mechanical system (MEMS) structures and design structures17 Mar 2020US 10,589,991 B2International Business Machines Corporation
- Micro-electro-mechanical system (MEMS) structures and design structures17 Mar 2020US 10,589,992 B2International Business Machines Corporation
- Method of manufacturing a microstructure23 Oct 2025US 2025/0326633 A1Memsstar Limited
- Method of manufacturing a microstructure23 Oct 2025US 2025/0326634 A1Memsstar Limited
- Inattentive HF Concentration Vapors Phase Release of Micro-electro-mechanical Systems and Optical Systems2 May 2024US 2024/0140786 A1UNM Rainforest Innovations
- Method of manufacturing a microstructure8 Dec 2022US 2022/0388837 A1Memsstar Limited
- Method and apparatus for reducing in-process and in-use stiction for mems devices8 Aug 2019US 2019/0241425 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Process for producing surface micromechanical structures216US 5,683,591 ARobert Bosch GmbH · 1997
- Anhydrous HF release of process for MEMS devices201US 7,365,016 B2DALSA Semiconductor Inc. · 2008
- Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation191US 7,008,812 B1IC Mechanics, Inc. · 2006
- Microstructure, process for manufacturing thereof and devices incorporating the same102US 5,658,698 ACanon Kabushiki Kaisha · 1997
- Method for manufacturing a micromechanical relay95US 6,162,657 AFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. · 2000