Micro-electro-mechanical system (MEMS) structures and design structures
AssigneeInternational Business Machines Corporation
InventorsMichael T. Brigham, Christopher V. Jahnes, Cameron E. Luce, Jeffrey C. Maling, William J. Murphy, Anthony K. Stamper, Eric J. White
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Abstract
Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a Micro-Electro-Mechanical System (MEMS) beam structure by venting both tungsten material and silicon material above and below the MEMS beam to form an upper cavity above the MEMS beam and a lower cavity structure below the MEMS beam.
Claims13
A structure, comprising a beam formed within a sacrificial material region including an upper sacrificial material portion formed over the beam, wherein the sacrificial material region is comprised of tungsten material and silicon material, further comprising a lid formed over the upper sacrificial material portion, the lid including at least two vent holes, wherein a first of the at least two vent holes is located to expose the silicon material in the upper sacrificial material portion above the beam and a second of the at least two vent holes is located to expose the tungsten material in the upper sacrificial material portion above the beam, wherein the beam includes a recess, wherein the tungsten material and silicon material of the upper sacrificial material portion extend into the recess, and wherein the beam separates the sacrificial material region into the upper sacrificial material portion and a lower sacrificial material portion of the sacrificial material region formed below the beam, the beam further comprising an opening in which the upper sacrificial material portion extends into contact with the lower sacrificial material portion.
Dependencies are inferred from the claim text.