B81C 1/00365
Having low tensile stress between layers
Official title: {having low tensile stress between layers}
B81C1/00365 (Having low tensile stress between layers) appears on 78 US grants and 84 published applications in this corpus.
Search patents in B81C- Granted patents
- 78
- Published applications
- 84
- Assignees
- 23
- Inventors
- 75
- Latest grant
- 20 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 0 | 1 |
| 2003 | 2 | 3 |
| 2004 | 1 | 2 |
| 2005 | 3 | 1 |
| 2006 | 2 | 4 |
| 2007 | 2 | 1 |
| 2008 | 1 | 0 |
| 2009 | 1 | 1 |
| 2010 | 0 | 0 |
| 2011 | 0 | 9 |
| 2012 | 0 | 0 |
| 2013 | 1 | 2 |
| 2014 | 5 | 3 |
| 2015 | 2 | 4 |
| 2016 | 6 | 18 |
| 2017 | 10 | 6 |
| 2018 | 14 | 13 |
| 2019 | 7 | 6 |
| 2020 | 10 | 3 |
| 2021 | 7 | 2 |
| 2022 | 0 | 1 |
| 2023 | 0 | 1 |
| 2024 | 2 | 1 |
| 2025 | 1 | 1 |
| 2026 | 1 | 1 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods20 Jan 2026US 12,528,696 B2Lawrence Semiconductor Research Laboratory, Inc.
- Method for controlling stress in a substrate during laser deposition2 Sep 2025US 12,403,547 B2Lam Researh Corporation
- Method of forming monocrystalline nickel-titanium films on single crystal silicon substrates using seed layers15 Oct 2024US 12,116,271 B2Arizona Board of Regents on behalf of Arizona State University
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods9 Apr 2024US 11,952,268 B2Lawrence Semiconductor Research Laboratory, Inc.
- Planar cavity MEMS and related structures, methods of manufacture and design structures16 Nov 2021US 11,174,160 B2International Business Machines Corporation
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods23 Apr 2026US 2026/0109595 A1Lawrence Semiconductor Research Laboratory, Inc.
- Monocrystalline nickel-titanium films on single crystal silicon substrates using seed layers16 Jan 2025US 2025/0019230 A1
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods27 Jun 2024US 2024/0208805 A1Lawrence Semiconductor Research Laboratory, Inc.
- Monocrystalline nickel-titanium films on single crystal silicon substrates using seed layers16 Feb 2023US 2023/0052052 A1Arizona Board of Regents on behalf of Arizona State University
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods15 Dec 2022US 2022/0396476 A1Lawrence Semiconductor Research Laboratory, Inc.
Most cited
By later US patents
- Planar cavity MEMS and related structures, methods of manufacture and design structures48US 8,921,144 B2International Business Machines Corporation · 2014
- Method of manufacturing a micro-electro-mechanical system (MEMS)47US 8,458,888 B2International Business Machines Corporation · 2013
- Planar cavity MEMS and related structures, methods of manufacture and design structures40US 8,709,264 B2International Business Machines Corporation · 2014
- Planar cavity MEMS and related structures, methods of manufacture and design structures37US 8,685,778 B2International Business Machines Corporation · 2014
- Planar cavity MEMS and related structures, methods of manufacture and design structures37US 8,722,445 B2International Business Machines Corporation · 2014