Planar cavity MEMS and related structures, methods of manufacture and design structures
AssigneeInternational Business Machines Corporation
InventorsChristopher V. Jahnes, Anthony K. Stamper
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Abstract
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.
Claims25
A method of forming a Micro-Electro-Mechanical System (MEMS) beam, comprising:
- determining a layout of a lower electrode;
- determining a metal volume of the lower electrode and a metal volume of an upper electrode based at least on the layout of the lower electrode;
- forming the lower electrode on a sacrificial layer using the metal volume of the lower electrode;
- forming an insulator layer on the lower electrode;
- and
- forming the upper electrode over the insulator material on top of the lower electrode, the upper electrode being formed using the metal volume of the upper electrode and being at least partially in contact with the lower electrode,
- wherein the determining of the metal volume of the lower electrode and the metal volume of the upper electrode includes adjusting the metal volume of the lower electrode and the metal volume of the upper electrode to modify beam bending.
A method of forming a switch, comprising:
- determining a metal thickness and a layout of a conductor layer;
- and
- forming a moveable beam comprising at least one insulator layer on the conductor layer such that a volume of the conductor layer is adjusted, based on the metal thickness and the layout of the conductor layer, to modify beam bending characteristics.
A method, comprising:
- determining a layout of a lower electrode;
- determining a metal volume of the lower electrode and a metal volume of an upper electrode based at least on the layout of the lower electrode;
- forming the lower electrode using the metal volume of the lower electrode;
- and
- forming the upper electrode on top of the lower electrode using the metal volume of the upper electrode,
- wherein the forming of the lower electrode and the upper electrode includes balancing the metal volume of the lower electrode with respect to the metal volume of the upper electrode.
Dependencies are inferred from the claim text.