B81B 3/0018
Structures acting upon the moving or flexible element for transforming energy into
Official title: {Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators}
B81B3/0018 (Structures acting upon the moving or flexible element for transforming energy into) appears on 1,676 US grants and 1,922 published applications in this corpus.
Search patents in B81B- Granted patents
- 1,676
- Published applications
- 1,922
- Assignees
- 592
- Inventors
- 2,944
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 1 | 0 |
| 1996 | 4 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 5 | 0 |
| 2000 | 6 | 0 |
| 2001 | 11 | 7 |
| 2002 | 19 | 20 |
| 2003 | 20 | 29 |
| 2004 | 31 | 23 |
| 2005 | 16 | 22 |
| 2006 | 18 | 21 |
| 2007 | 12 | 38 |
| 2008 | 25 | 29 |
| 2009 | 11 | 35 |
| 2010 | 24 | 40 |
| 2011 | 37 | 25 |
| 2012 | 24 | 36 |
| 2013 | 52 | 103 |
| 2014 | 92 | 127 |
| 2015 | 126 | 122 |
| 2016 | 93 | 87 |
| 2017 | 104 | 107 |
| 2018 | 81 | 117 |
| 2019 | 91 | 112 |
| 2020 | 128 | 133 |
| 2021 | 94 | 159 |
| 2022 | 112 | 164 |
| 2023 | 136 | 133 |
| 2024 | 116 | 104 |
| 2025 | 108 | 73 |
| 2026 | 74 | 56 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- B81B 3/0021Transducers for transforming electrical into mechanical energy or vice versa1,161
- B81B 3/0024Transducers for transforming thermal into mechanical energy or vice versa132
- B81B 3/0027Structures for transforming mechanical energy86
- B81B 3/0032Structures for transforming energy not provided for in groups b81b3/0021 - b81b3/002945
- B81B 3/0029Transducers for transforming light into mechanical energy or viceversa41
Recent patents
- Engineered substrates, free-standing semiconductor microstructures, and related systems and methods6 Oct 2026US 12,753,068 B2Lawrence Semiconductor Research Laboratory, Inc.
- Microelectromechanical acceleration sensor29 Sep 2026US 12,748,127 B2Robert Bosch GmbH
- Method of fabricating micro-electromechanical system device22 Sep 2026US 12,741,865 B2Vanguard International Semiconductor Corporation
- Light-based tactile sensing with directional sensitivity22 Sep 2026US 12,742,693 B2The Regents of the University of Michigan
- Micro-electro-mechanical system device1 Sep 2026US 12,722,968 B2Vanguard International Semiconductor Corporation
- Capacitive rf microswitch for high-power applications8 Oct 2026US 2026/0311937 A1
- Semiconductor device17 Sep 2026US 2026/0274648 A1Infineon Technologies AG
- Ultrasonic transceiver with stacked die back cavity10 Sep 2026US 2026/0265045 A1
- Acoustic devices with residual stress compensation3 Sep 2026US 2026/0261805 A1Skyworks Solutions, Inc.
- Mems microphone and mems accelerometer on a single substrate27 Aug 2026US 2026/0250120 A1Taiwan Semiconductor Manufacturing Company.Ltd
Most cited
By later US patents
- Laterally driven resonant microstructures419US 5,025,346 AThe Regents of the University of California · 1991
- Opto-electro-mechanical device or filter, process for making, and sensors made therefrom408US 5,559,358 AHoneywell Inc. · 1996
- Boron nutride membrane in wafer structure239US 5,270,125 ARedwood Microsystems, Inc. · 1993
- Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same198US 6,127,908 AMassachusetts Institute of Technology · 2000
- Microfabricated elastomeric valve and pump systems196US 7,144,616 B1California Institute of Technology · 2006