A microelectromechanical acceleration sensor, comprising:
- a substrate;
- a heavy mass movably suspended above an upper side of the substrate;
- four lightweight masses movably suspended above the upper side of the substrate, wherein the heavy mass is heavier than the total mass of the four lightweight masses;
- and
- four electrode systems arranged above the upper side of the substrate;
- wherein the heavy mass laterally encloses the lightweight masses and the electrode systems,
- wherein the electrode systems are arranged such that the microelectromechanical acceleration sensor has a fourfold rotational symmetry with respect to a rotation axis perpendicular to the substrate,
- wherein each of the electrode systems has two electrode structures arranged next to one another,
- wherein each of the electrode structures has a first fixed electrode, a second fixed electrode, a first movable electrode, and a second movable electrode,
- wherein the first movable electrodes of each of the electrode systems are arranged on sides, facing away from one another, of the electrode structures of the electrode system and are each firmly connected to the heavy mass, and the second movable electrodes of an electrode system are arranged on sides, facing one another, of the electrode structures of a corresponding electrode system and are each firmly connected to a lightweight mass,
- wherein the first and second fixed electrodes of the electrode structures each have a first and second fixed comb of first and second fixed electrode surfaces, which are oriented perpendicularly to the substrate and project parallel to the substrate in opposite directions,
- wherein the first and second movable electrodes of the electrode structures each have a first and second movable comb of first and second movable electrode surfaces, which are arranged parallel to the first and second fixed electrode surfaces and project in opposite directions,
- wherein the first movable comb and the first fixed comb of each of the electrode structures interleave and form first electrical capacitances, and the second movable comb and the second fixed comb of each of the electrode structures interleave and form second electrical capacitances,
- wherein the heavy mass and the lightweight masses are coupled to one another such that a deflection of the heavy mass parallel to the substrate and in a direction perpendicular to the fixed and movable electrode surfaces of two opposing ones of the electrode systems causes the lightweight masses connected to the opposing electrode systems to be deflected in an opposite direction.