Semiconductor device
AssigneeInfineon Technologies AG
InventorsAndreas Bogner, Christian Bretthauer, Abhiraj Basavanna
Life of this patent
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Abstract
In an embodiment a method includes making a support structure and a deformable membrane supported by the support structure, wherein at least one mass element is connected to the deformable membrane, and electrically contacting the deformable membrane to circuitry, the circuitry configured to obtain an electric signal indicative of a deformation of the deformable membrane conditioned by a movement of the at least one mass element, wherein the deformable membrane comprises a membrane border that is partially in direct contact with the support structure and partially separated from the support structure.
Claims20
A method for manufacturing a semiconductor device, the method comprising:
- making a support structure and a deformable membrane supported by the support structure, wherein at least one mass element is connected to the deformable membrane;
- and
- electrically contacting the deformable membrane to circuitry, the circuitry configured to obtain an electric signal indicative of a deformation of the deformable membrane conditioned by a movement of the at least one mass element,
- wherein the deformable membrane comprises a membrane border that is partially in direct contact with the support structure and partially separated from the support structure.
A method for manufacturing a semiconductor device, the method comprising:
- making a support structure and a deformable membrane supported by the support structure, wherein at least one mass element is connected to the deformable membrane;
- and
- electrically contacting the deformable membrane to circuitry, the circuitry configured to obtain an electric signal indicative of a deformation of the deformable membrane conditioned by movement of the at least one mass element,
- wherein the deformable membrane comprises a membrane border comprising a plurality of elastic connections directly connecting the deformable membrane to the support structure, and a plurality of apertures.
Dependencies are inferred from the claim text.