Opto-electro-mechanical device or filter, process for making, and sensors made therefrom

A strain sensor array of a plurality of resonant semiconductor microstructures, comprising:

• a semiconductor base having a plurality of cavities therein;
• a plurality of vibratory flexible members corresponding to the cavities, and formed integrally of a semiconductor material and having at least one portion connected to the semiconductor base proximate a cavity;
• and forming an optical interference structure in cooperation with at least one other fixed surface of the semiconductor base, so that an amount of incident light energy traverses the vibratory flexible member and is then reflected from the at least one other fixed surface of the semiconductor base thereby creating an optical interference pattern consistent with the vibration of the flexible member;
• and wherein at least two of the plurality of flexible members are oriented orthogonal from each other on the semiconductor base to optimize sensitivity to two-dimensional strain.

A microstructure that vibrates in response to incident light directed at the microstructure, comprising:

• a semiconductor base having a cavity in one side;
• a first flexible beam member that transmits a majority of said incident light directed thereon and formed integrally of a semiconductor material and having a distal end connected to the semiconductor base proximate the cavity and a proximal end connected to the semiconductor base so that the flexible beam member spans the cavity;
• and,
• a first photovoltaic drive structure disposed so that a portion lies within the cavity.