B81B 2203/056
Rotation in a plane parallel to the substrate
B81B2203/056 (Rotation in a plane parallel to the substrate) appears on 71 US grants and 101 published applications in this corpus.
Search patents in B81B- Granted patents
- 71
- Published applications
- 101
- Assignees
- 65
- Inventors
- 256
- Latest grant
- 3 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 2 | 2 |
| 2003 | 1 | 2 |
| 2004 | 2 | 4 |
| 2005 | 1 | 2 |
| 2006 | 4 | 1 |
| 2007 | 1 | 1 |
| 2008 | 0 | 1 |
| 2009 | 5 | 3 |
| 2010 | 3 | 1 |
| 2011 | 0 | 0 |
| 2012 | 0 | 1 |
| 2013 | 1 | 2 |
| 2014 | 0 | 2 |
| 2015 | 2 | 1 |
| 2016 | 3 | 1 |
| 2017 | 0 | 3 |
| 2018 | 2 | 6 |
| 2019 | 3 | 10 |
| 2020 | 6 | 3 |
| 2021 | 5 | 8 |
| 2022 | 6 | 10 |
| 2023 | 7 | 7 |
| 2024 | 7 | 7 |
| 2025 | 4 | 13 |
| 2026 | 2 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Microelectromechanical devices for higher order passive temperature compensation and methods of designing thereof3 Mar 2026US 12,565,421 B2Stathera IP Holdings Inc.
- Motion limiter with reduced stiction20 Jan 2026US 12,528,693 B2Murata Manufacturing Co., Ltd.
- Microsystem for measuring rotational movement and measurement device therefor2 Dec 2025US 12,487,070 B2Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Scanning MEMS mirror device7 Oct 2025US 12,434,961 B2Vlc Holding B.V.
- MEMS transducer13 May 2025US 12,297,096 B2Soundskrit Inc.
- Microelectromechanical device with recovery from stiction conditions1 Oct 2026US 2026/0296874 A1STMicroelectronics International N. V.
- Reduction of non-linear motion of mems masses23 Jul 2026US 2026/0209029 A1InvenSense, Inc.
- Mems rotating micro actuators9 Jul 2026US 2026/0193078 A1Preciseley Microtechnology Corp.
- Designs and methods for maufacturing out-of-plane rotation stops for mems devices21 May 2026US 2026/0138866 A1Huawei Technologies Co., Ltd.
- Acoustic resonating devices and assemblies23 Apr 2026US 2026/0109594 A1University of Pittsburgh—Of the Commonwealth System of Higher Education
Most cited
By later US patents
- Microfabricated structures with trench-isolation using bonded-substrates and cavities150US 6,433,401 B1Analog Devices IMI, Inc. · 2002
- Gimballed vibrating wheel gyroscope having strain relief features82US 5,650,568 AThe Charles Stark Draper Laboratory, Inc. · 1997
- Acceleration sensor and manufacturing method for the same55US 6,772,632 B2Wacoh Corporation · 2004
- Gimballed vibrating wheel gyroscope41US 5,535,902 AThe Charles Stark Draper Laboratory, Inc. · 1996
- Whiffletree accelerometer30US 6,662,658 B2Honeywell International Inc. · 2003