Microsystem for measuring rotational movement and measurement device therefor
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorGuillaume Jourdan
Life of this patent
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Abstract
A microsystem includes a substrate; a main part connected to the substrate via an anchor; a moving part configured to rotate about an axis of rotation O; a first beam connecting the moving part to the main part, the main direction of said first beam being along a first vector ej1 having as origin the junction of the moving part with the first beam and in the sense of the main part; a second beam connecting the moving part to the main part, the main direction of the second beam being along a second vector ej2 having as origin the junction of the moving part with the second beam and in the sense of the main part.
Claims17
A microsystem comprising:
- a substrate;
- a main part connected to the substrate via an anchor;
- a moving part configured to rotate about an axis of rotation O;
- a first beam connecting the moving part to the main part, a main direction of said first beam being along a first vector ej1 having as origin a junction M1 of the moving part with the first beam and as direction the main part;
- a second beam connecting the moving part to the main part, the main direction of said second beam being along a second vector ej2 having as origin a junction M2 of the moving part with the second beam and as direction the main part;
- wherein the first vector ej1 and the second vector ej2 have the same direction and are of opposite sense, a position of the junctions M1 and M2 being chosen so that the vector product O′M1{circumflex over ( )}ej1 and the vector product O′M2{circumflex over ( )}ej2 have the same sign, where O′ is a point of intersection between the axis of rotation O and a plane perpendicular to said axis containing the first vector ej1 and the second vector ej2, the first and second beams being connected to the anchor via the main part.
Dependencies are inferred from the claim text.