Whiffletree accelerometer

An accelerometer, comprising:

• a frame formed in a substantially planar substrate;
• a substantially planar proof mass formed in the substrate and having a first base portion suspended from the frame by one or more first flexures and a whifflebeam portion suspended from the first base portion by a second flexure for rotation about an axis substantially normal to the plane of the proof mass;
• and
• first and second force-versus-displacement sensors suspended to operate in a push-pull mode between the frame and the whifflebeam portion of the proof mass on opposite sides of the second flexure.

A suspension structure for suspending one or more force-versus-displacement sensors for measuring displacement of a pendular structure relative to a frame structure, the suspension structure comprising:

• a frame structure;
• and
• a pendular structure comprising:
• a base structure suspended from the frame structure for rotation about a first axis,
• a beam structure spaced away from the first axis, and
• a suspension means for suspending the beam structure from the base structure for rotation about a second axis that is oriented substantially perpendicularly to the first axis.

A method for resolving nonlinearities in an accelerometer, the method comprising:

• suspending a base portion of a proof mass for rotation about a first axis relative to a frame member;
• suspending a beam portion of a proof mass for rotation about a second axis relative to the base portion of the proof mass;
• and
• suspending means for measuring force versus displacement between different positions on the frame member and each of two positions on the beam portion that are spaced apart on opposite sides of the second axis of rotation.