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US 12,434,961 B2Granted
Scanning MEMS mirror device
AssigneeVlc Holding B.V.
InventorHendrikus Wilhelmus Leonardus Antonius Maria Van Lierop
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AssigneeVlc Holding B.V.
InventorHendrikus Wilhelmus Leonardus Antonius Maria Van Lierop
Estimating the term…
The improved scanning MEMS mirror device disclosed herein comprises a mirror body that is rotatable around a rotation axis with respect to a stationary body, wherein a rotation of the mirror body is flexibly restrained with at least one coupling element that biases the mirror body towards a neutral state. The coupling element comprises at least a bridge section and a first leaf spring section and a second leaf spring section. The first leaf spring section extends in an extension direction from a first end thereof at the bridge section towards a second end thereof that is connected to the mirror body. The second leaf spring section extends in an extension direction from a first end thereof at the bridge section towards a second end thereof where it is connected to the stationary body. The extension direction of the first leaf spring section and the extension direction of the second leaf spring section are at least substantially the same as the second planar direction. The leaf spring sections have a thickness defined in a direction orthogonal to the reference plane that is smaller than their width, defined in said first planar direction. The construction of the improved scanning MEMS mirror device results in an increased eigenfrequency of undesirable eigenmodes.
A scanning MEMS mirror device comprising a mirror body that is rotatable around a rotation axis with respect to a stationary body, wherein a rotation of the mirror body is flexibly restrained with at least one coupling element that biases the mirror body towards a neutral state wherein a mirror surface of the mirror body is parallel with a reference plane with a first planar direction defined by the rotation axis and a second planar direction orthogonal thereto, the coupling element comprising at least a bridge section and a first leaf spring section and a second leaf spring section, the first leaf spring section extending in an extension direction from a first end of the first leaf spring section at the bridge section towards a second end of the first leaf spring section that is connected to the mirror body and the second leaf spring section extending in an extension direction from a first end of the second leaf spring section at the bridge section towards a second end of the second leaf spring section that is connected to the stationary, the extension direction of the first leaf spring section and the extension direction of the second leaf spring section being at least substantially the same as the second planar direction, the first and the second leaf spring section having a thickness defined in a direction orthogonal to the reference plane and having a width defined in said first planar direction, the thickness being smaller than the width.
Dependencies are inferred from the claim text.