MEMS transducer
AssigneeSoundskrit Inc.
InventorsStephane Leahy, Wan-Thai Hsu, Mohsin Nawaz, Carly Stalder, Sahil Gupta, Meysam Daeichin
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Abstract
A microelectromechanical system (MEMS) transducer includes a substrate and a pair of electrodes supported by the substrate. The pair of electrodes are configured as a bias electrode-sense electrode couple. A moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode. The pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction. The moveable electrode includes a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction.
Claims20
A microelectromechanical system (MEMS) transducer comprising:
- a substrate;
- and
- a pair of electrodes supported by the substrate, the pair of electrodes being configured as a bias electrode-sense electrode couple;
- wherein:
- a moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode;
- a further electrode of the pair of electrodes is spaced apart from the moveable electrode by a gap in a second direction perpendicular to the first direction;
- the further electrode of the pair of electrodes comprises a cantilevered end, the cantilevered end being warped to exhibit a deflection along the first direction;
- the moveable electrode comprises a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction;
- the resting deflection of the moveable electrode is greater than the deflection of the further electrode;
- and
- the moveable electrode and the further electrode have the same thickness.
A microelectromechanical system (MEMS) transducer comprising:
- a substrate;
- and
- a pair of electrodes supported by the substrate, the pair of electrodes being configured as a bias electrode-sense electrode couple;
- wherein:
- a moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode;
- the pair of electrodes are spaced apart from one another by a gap in a second direction perpendicular to the first direction;
- and
- the moveable electrode of the pair of electrodes comprises a cantilevered end, the cantilevered end being warped to exhibit a resting deflection toward the substrate along the first direction.
A microelectromechanical system (MEMS) transducer comprising:
- a substrate comprising a cavity;
- and
- a pair of electrodes supported by the substrate, the pair of electrodes being configured as a bias electrode-sense electrode couple for the measurement;
- wherein:
- a moveable electrode of the pair of electrodes is configured for vibrational movement in a first direction during excitation of the moveable electrode;
- a fixed electrode of the pair of electrodes is spaced apart from the moveable electrode by a gap in a second direction perpendicular to the first direction;
- the moveable electrode comprises a cantilevered end, the cantilevered end being warped to exhibit a resting deflection along the first direction;
- the cavity is configured such that ambient air flows through the cavity during operation to reach the pair of electrodes;
- and
- the fixed electrode is biased and the moveable electrode is configured as a sense electrode.
Dependencies are inferred from the claim text.