Reduction of non-linear motion of mems masses
AssigneeInvenSense, Inc.
InventorsMohammad H. Asadian Ardakani, Daryosh Vatanparvar, Lorenzo Bertini, Robert Hennessy
Life of this patent
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Abstract
A MEMS inertial sensor includes a levered component within the MEMS layer of the sensor that transfers motion to one or more movable masses. The levered component moves in a rotational motion about a pivot point and is connected to one of the masses by a flexible coupling. The flexible coupling includes multiple spring elements that are connected and configured to transfer only a linear motion in one direction to the connected mass while eliminating a transfer of the rotational motion to the connected mass.
Claims21
A microelectromechanical system (MEMS) sensor, comprising:
- a movable mass within a MEMS layer of the MEMS sensor;
- a levered component within the MEMS layer that rotates within a horizontal plane of the MEMS layer about a point of rotation such that the levered component moves in both a first direction in the horizontal plane and a second direction in the horizontal plane during the rotation, wherein the first direction and the second direction are perpendicular;
- and
- a flexible coupling that connects to the movable mass and to the levered component, wherein the flexible coupling transfers movement from the levered component to the movable mass in the first direction, and is compliant in the second direction such that the rotation of the levered component does not cause movement of the movable mass in the second direction.
A microelectromechanical system (MEMS) sensor, comprising:
- a first movable mass within a MEMS layer of the MEMS sensor;
- a second movable mass within the MEMS layer and coupled to the first movable mass via one or more springs;
- a levered component within the MEMS layer that rotates within a horizontal plane of the MEMS layer about a point of rotation;
- and
- a flexible coupling that connects to the first movable mass and to the levered component, wherein the flexible coupling transfers movement from the levered component to the movable mass such that the first movable mass moves only in a first direction, and wherein the one or more springs transfer the movement in the first direction to the second movable mass without imparting a rotation on the second movable mass.
A microelectromechanical system (MEMS) system, comprising:
- a first movable mass within a MEMS layer of the MEMS sensor;
- a second movable mass within the MEMS layer and coupled to the first movable mass via one or more springs;
- a levered component within the MEMS layer that rotates within a horizontal plane of the MEMS layer about a point of rotation at a first frequency;
- and
- a flexible coupling that connects to the first movable mass and to the levered component, wherein the flexible coupling transfers movement from the levered component to the movable mass and the one or more springs transfer movement from the first movable mass to the second movable mass such that the second movable mass does not have any rotational movement at a harmonic of the first frequency.
Dependencies are inferred from the claim text.