B81B 2203/0136
Comb structures
B81B2203/0136 (Comb structures) appears on 259 US grants and 316 published applications in this corpus.
Search patents in B81B- Granted patents
- 259
- Published applications
- 316
- Assignees
- 136
- Inventors
- 557
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 2 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 4 | 0 |
| 2000 | 2 | 0 |
| 2001 | 7 | 4 |
| 2002 | 8 | 15 |
| 2003 | 4 | 13 |
| 2004 | 18 | 7 |
| 2005 | 12 | 12 |
| 2006 | 8 | 2 |
| 2007 | 5 | 8 |
| 2008 | 2 | 4 |
| 2009 | 4 | 2 |
| 2010 | 2 | 7 |
| 2011 | 5 | 10 |
| 2012 | 1 | 7 |
| 2013 | 9 | 5 |
| 2014 | 11 | 7 |
| 2015 | 2 | 5 |
| 2016 | 9 | 13 |
| 2017 | 9 | 20 |
| 2018 | 10 | 11 |
| 2019 | 19 | 15 |
| 2020 | 13 | 9 |
| 2021 | 15 | 29 |
| 2022 | 6 | 17 |
| 2023 | 23 | 22 |
| 2024 | 14 | 23 |
| 2025 | 16 | 30 |
| 2026 | 17 | 19 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS device6 Oct 2026US 12,753,069 B2Rohm Co., Ltd.
- Micro-electro-mechanical system and manufacturing method thereof29 Sep 2026US 12,747,154 B2Beijing BOE Technology Development Co., Ltd.
- Microscale flexible strain sensor8 Sep 2026US 12,729,106 B2Carnegie Mellon University
- Micromechanical arm array for mems actuators8 Sep 2026US 12,729,109 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Micro-electro-mechanical systems and preparation method thereof25 Aug 2026US 12,715,762 B2Huawei Technologies Co., Ltd.
- Micromechanical arm array for mems actuators8 Oct 2026US 2026/0307981 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Bonding pillar structure for hidden comb microelectromechanical system17 Sep 2026US 2026/0280449 A1Lumentum Operations LLC
- Three dimensional trace for micro-electromechanical system (mems) devices27 Aug 2026US 2026/0250123 A1Lumentum Operations LLC
- Mems device having a damping and stopping multifunction structure20 Aug 2026US 2026/0242206 A1STMicroelectronics International N. V.
- Microfluidic conveying system and method for operating a microfluidic conveying system20 Aug 2026US 2026/0242207 A1
Most cited
By later US patents
- Vertical comb drive actuated deformable mirror device and method166US 6,384,952 B1Mems Optical, Inc. · 2002
- Accelerometer sensor of crystalline material and method for manufacturing the same160US 5,578,755 ARobert Bosch GmbH · 1996
- Microelectromechanical lateral accelerometer119US 5,563,343 ACornell Research Foundation, Inc. · 1996
- Microelectromechanical lateral accelerometer102US 5,610,335 ACornell Research Foundation, Inc. · 1997
- Micromachined device with enhanced dimensional control91US 6,282,960 B1Analog Devices, Inc. · 2001