B25J 11/0095
Manipulators transporting wafers
Official title: {Manipulators transporting wafers}
B25J11/0095 (Manipulators transporting wafers) appears on 451 US grants and 729 published applications in this corpus.
Search patents in B25J- Granted patents
- 451
- Published applications
- 729
- Assignees
- 165
- Inventors
- 1,177
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2008 | 0 | 2 |
| 2009 | 0 | 1 |
| 2010 | 0 | 1 |
| 2011 | 0 | 1 |
| 2012 | 2 | 7 |
| 2013 | 0 | 12 |
| 2014 | 7 | 17 |
| 2015 | 18 | 45 |
| 2016 | 24 | 38 |
| 2017 | 24 | 27 |
| 2018 | 25 | 31 |
| 2019 | 40 | 37 |
| 2020 | 30 | 42 |
| 2021 | 23 | 48 |
| 2022 | 29 | 82 |
| 2023 | 52 | 76 |
| 2024 | 54 | 85 |
| 2025 | 66 | 88 |
| 2026 | 57 | 89 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Power supply apparatus and semiconductor manufacturing equipment, transport system including the same15 Sep 2026US 12,740,370 B2Semes Co., Ltd.
- Method and apparatus for aligning wafer using laser scanner, semiconductor transfer device15 Sep 2026US 12,740,373 B2Semes Co., Ltd.
- Apparatus, system and method for providing a flipper for in-process substrates15 Sep 2026US 12,740,375 B2Jabil Inc.
- Substrate handling device with vertical and horizontal rails for cleaning modules8 Sep 2026US 12,728,540 B2APPLIED Materials.Inc.
- Method and/or system for processing a substrate and robot apparatus therefor1 Sep 2026US 12,722,310 B2Service Support Specialties, Inc.
- Robot blade for wafers and workpieces & thin wafers and workpieces8 Oct 2026US 2026/0307270 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Compound fork device and system including the same8 Oct 2026US 2026/0307271 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Substrate transfer apparatus8 Oct 2026US 2026/0307275 A1Kawasaki Jukogyo Kabushiki Kaisha
- Substrate Processing System and Substrate Transfer Method8 Oct 2026US 2026/0310186 A1Tokyo Electron Limited
- Substrate processing method and substrate processing apparatus8 Oct 2026US 2026/0314296 A1SCREEN Holdings Co., Ltd.
Most cited
By later US patents
- Method for reducing particle generation at bevel portion of substrate468US 9,343,343 B2ASM IP Holding B. V. · 2016
- Interfacing with a mobile telepresence robot142US 8,718,837 B2Intouch Technologies, Inc. · 2014
- Interfacing with a mobile telepresence robot50US 8,965,579 B2Intouch Technologies, Inc. · 2015
- Automated replacement of consumable parts using end effectors interfacing with plasma processing system26US 10,124,492 B2Lam Research Corporation · 2018
- Interfacing with a mobile telepresence robot25US 9,469,030 B2Intouch Technologies, Inc. · 2016