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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsin-Kai HUANG, Kuei-Hsiung CHO, Fu-Kuo TSENG, Chun-Jen CHAN, Chun Yan CHEN
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A cross-shape transfer blade is configured to, in operation, be mounted or coupled to an end of a transfer robot arm (TRA). The cross-shape robot or transfer blade includes a plurality of raised regions to contact a backside of a workpiece or thin workpiece such that the cross-shape transfer blade supports and transports the respective workpeice between various locations within a semiconductor manufacturing plant (FAB). The cross-shape transfer blade includes a first prong structure, a second prong structure, a first wing structure, and a second wing structure. Respective ones of the plurality of raised regions are at corresponding ones of the first prong structure, the second prong structure, the first wing structure, and the second wing structure minimizing contact between the backside of the workpiece or thin workpiece and the cross-shape transfer blade when the workpiece or thin workpiece is being transferred, transported, and supported by the cross-shape transfer blade.
A method, comprising:
The method of claim 1, further comprising determining that the workpiece is on the one or more support structures with a sensor.
The method of claim 2, wherein the sensor is coupled to a mounting structure that supports that transfer blade.
The method of claim 3, wherein the sensor extends past an asymmetrical barrier structure of the transfer blade at end of the transfer blade coupled to the mounting structure.
The method of claim 1, wherein the first raised curved region and the second raised contact regions are spaced inward from an edge of the workpiece when lifting the workpiece off the one or more support structures.
The method of claim 1, wherein the one or more support structures define an opening through which the transfer blade passe through when lifting the workpiece off the one or more support structures.
The method of claim 1, further comprising, after lifting the workpiece off the one or more support structures, transferring the workpiece on the transfer blade from a first location to a second location.
The method of claim 7, wherein transferring the workpiece from the first location to the second location includes depositing the workpiece at the second location.
A method, comprising:
The method of claim 9, wherein the transfer blade further includes:
The method of claim 10, wherein the first prong includes a first hooked structure at a respective end of the first prong, and the second prong includes a second hooked structure at a respective end of the second prong.
The method of claim 9, wherein the first wing structure and the second wing structure have a parabolic profile.
The method of claim 9, wherein the transfer blade further includes a fifth raised region closer to a mounting end of the transfer blade than the first wing structure and the second wing structure.
The method of claim 9, further comprising:
The method of claim 9, wherein the workpiece is substantially level when on the transfer blade such that an edge of the workpiece clears the support structure when the transfer blade is raised.
The method of claim 9, wherein the transfer blade has a thickness that provides clearance space such that the plurality of raised regions are fully spaced apart from the backside of the workpiece when removing the transfer blade from underneath the workpiece.
A system, comprising:
The system of claim 17, wherein the plurality of transfer blades are configured to be inserted into a cassette to remove and transport multiple workpieces at the same time.
The system of claim 17, wherein each transfer blade of the plurality of transfer blades further includes
The system of claim 17, wherein the first wing structure and the second wing structure of each transfer blade have a parabolic profile.
Dependencies are inferred from the claim text.