Substrate transfer apparatus
AssigneesKawasaki Jukogyo Kabushiki Kaisha, Kawasaki Robotics (USA), Inc.
InventorsHaruhiko TAN, Simon JEYAPALAN, Ming ZENG
Life of this patent
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Abstract
A substrate transfer apparatus according to one or more embodiments may include a rotator that comprises a grip pad griping a substrate and rotates the substrate, a detector that detects a positioning mark of the substrate, and a substrate transport mechanism that places the substrate on the grip pad and lifts the substrate from the grip pad. In one or more embodiments, the grip pad may have adhesiveness and grips the substrate, and have a plurality of directivity with respect to the adhesiveness.
Claims17
A substrate transfer apparatus comprising:
- a rotator that comprises a grip pad griping a substrate and rotates the substrate;
- a detector that detects a positioning mark of the substrate;
- and an edge of the substrate and
- a substrate transport mechanism that places the substrate on the grip pad and lifts the substrate from the grip pad, wherein
- the grip pad has adhesiveness and grips the substrate, and has a plurality of directivity with respect to the adhesiveness,
- the substrate transfer apparatus performs positioning and eccentricity detection of the substrate based on the detected positioning mark and the edge of the substrate.
A substrate transfer apparatus, comprising:
- a base;
- an elevator connected to the base that is raised and lowered;
- and
- a substrate transport mechanism that is movably connected to the elevator, and transports a substrate, the substrate transport mechanism comprising a grip pad that grips substrate, wherein
- the grip pad has a plurality of directivity with respect to adhesiveness.
A substrate transfer apparatus comprising:
- a housing comprising an opening formed in an extended direction;
- a moving unit arranged extending inside and outside the housing through the opening;
- a hand comprising a grip pad that grips a substrate and is connected to a portion extending outside the housing;
- and
- a driver arranged in the housing and moving the moving unit in the extended direction, wherein
- the grip pad has adhesiveness and grips the substrate, and has a plurality of directivity with respect to the adhesiveness.
Dependencies are inferred from the claim text.