US 10,124,492 B2 · Automated replacement of consumable parts using end effectors interfacing with plasma processing system

Abstract

A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement station is coupled to the second side of the isolation valve. The replacement station includes an exchange handler and a part buffer. The part buffer includes a plurality of compartments to hold new or used consumable parts. The process module includes a lift mechanism to enable placement of a consumable part installed in the process module to a raised position. The raised position provides access to the exchange handler to enable removal of the consumable part from the process module and store in a compartment of the part buffer. The exchange handler of the replacement station is configured to provide a replacement for the consumable part from the part buffer back to the process module. The lift mechanism is configured to receive the consumable part provided for replacement by the exchange handler and lower the consumable part to an installed position. The replacement by the exchange handler and the process module is conducted while the process module and the replacement station are maintained in a vacuum state.

Claims26

Dependent claims

An end-effector mechanism connectable to a robot, comprising:

a wrist plate;
a mounting armset connected to the wrist plate, the mounting armset having a top plate and a bottom plate;
a finger assembly clamped between the top plate and the bottom plate of the mounting armset, the finger assembly includes a pair of fingers extending outward from the mounting armset, the finger assembly having a proximal end adjacent to the mounting armset and a distal end at tips of the pair of fingers;
and
a first pair of consumable contact pads disposed on a top surface of the finger assembly and located at the proximal end of the finger assembly;
a second pair of consumable contact pads disposed on the top surface of the finger assembly and located at the distal end of the finger assembly;
a third pair of substrate contact pads disposed on the top surface of the finger assembly adjacent to the first pair of consumable contact pads and between the first pair and second pair of consumable contact pads;
and
a fourth pair of substrate contact pads disposed on the top surface of the finger assembly adjacent to the second pair of consumable contact pads and between the first pair and second pair of consumable contact pads,
wherein the finger assembly is configured for transporting both a consumable part using the first and second pairs of consumable contact pads and a substrate using the third and fourth pairs of substrate contact pads.

7 more elements

An atmospheric transfer module in a cluster tool assembly, the atmospheric transfer module disposed between a replacement station and a loadlock chamber, such that the replacement station is interfaced to a first side of the atmospheric transfer module and the loadlock chamber is interfaced to a second side of the atmospheric transfer module, the atmospheric transfer module including:

a robot with an end-effector mechanism, the end-effector mechanism comprising,
a wrist plate;
a mounting armset connected to the wrist plate, the mounting armset having a top plate and a bottom plate;
a finger assembly clamped between the top plate and the bottom plate of the mounting armset, the finger assembly includes a pair of fingers extending outward from the mounting armset, the finger assembly having a proximal end proximal to the mounting armset and a distal end at tips of the pair of fingers;
a first pair of consumable contact pads disposed on a top surface of the finger assembly and located at the proximal end of the finger assembly;
a second pair of consumable contact pads disposed on the top surface of the finger assembly and located at the distal end of the finger assembly,
a third pair of substrate contact pads disposed on the top surface of the finger assembly adjacent to the first pair of consumable contact pads and between the first pair and second pair of consumable contact pads;
and
a fourth pair of substrate contact pads disposed on the top surface of the finger assembly adjacent to the second pair of consumable contact pads and between the first pair and second pair of consumable contact pads;
wherein the finger assembly is configured to transport both a consumable part using the first and the second pairs of consumable contact pads and a substrate using the third and the fourth pairs of substrate contact pads,
wherein the replacement station includes a part buffer with a plurality of compartments to store new or used consumable parts.

8 more elements

An atmospheric transfer module in a cluster tool assembly, the atmospheric transfer module disposed between a replacement station and a loadlock chamber, such that the replacement station is interfaced to a first side of the atmospheric transfer module, and a first side of the loadlock chamber is interfaced to a second side of the atmospheric transfer module, the atmospheric transfer module including:

a first robot having a first end-effector mechanism, the first end-effector mechanism of the first robot includes,
a wrist plate;
a mounting armset connected to the wrist plate;
a finger assembly mounted to the mounting armset and includes a pair of fingers extending outward from the mounting armset, the finger assembly having a proximal end proximal to the mounting armset and a distal end defined at tips of the pair of fingers;
a first carrier contact pad disposed on a top surface of the finger assembly proximal to a center of a fork defined by the pair of fingers;
and
a second pair of carrier contact pads disposed on the top surface of the finger assembly and located proximal to the distal end of the finger assembly,
wherein the finger assembly is configured to transport a substrate and support a carrier plate using the first carrier and the second pair of carrier contact pads, wherein the carrier plate is configured to support a consumable part.

5 more elements

Dependencies are inferred from the claim text.

Automated replacement of consumable parts using end effectors interfacing with plasma processing system

Life of this patent

Automated replacement of consumable parts using end effectors interfacing with plasma processing system

Life of this patent

Abstract

Claims26