Power supply apparatus and semiconductor manufacturing equipment, transport system including the same

A semiconductor manufacturing equipment, comprising:

• a processing module in which processes on substrates are performed;
• a substrate transfer robot configured to transfer the substrates;
• and
• a power supply apparatus configured to supply power to the substrate transfer robot,
• wherein the power supply apparatus comprises:
• a first base member made of a conductive material installed along a moving path of the substrate transfer robot;
• a second base member made of a magnetic core material and having a first surface contacting the first base member;
• a track member disposed on a second surface of the second base member, the second surface being opposite to the first surface;
• a power supply member installed on a side of the track member and to which current is applied to supply power;
• and
• a power reception core member provided in the substrate transfer robot,
• wherein the power reception core member includes a power reception member disposed at a predetermined interval from the power supply member, and magnetically coupled to the power supply member to generate an induced current.

A transport system for transporting articles in a semiconductor manufacturing plant, the system comprising:

• a travel rail configured to provide a travel path of a transport cart for transporting the articles;
• and
• a power supply apparatus configured to supply power to the transport cart,
• wherein the power supply apparatus comprises:
• a first base member made of a conductive material installed along a moving path of the transport cart;
• a second base member made of a magnetic core material and having a first surface contacting a surface of the first base member;
• a track member disposed on a second surface of the second base member, the second surface being opposite to the first surface;
• a power supply member installed in the track member and to which current is applied to supply power;
• and
• a power reception core member provided in the transport cart,
• wherein the power reception core member includes a power reception member disposed at a predetermined interval from the power supply member, and magnetically coupled to the power supply member to generate an induced current.