Y10S 414/138
Wafers positioned vertically within cassette
Y10S414/138 (Wafers positioned vertically within cassette) appears on 257 US grants and 73 published applications in this corpus.
Search patents in Y10S- Granted patents
- 257
- Published applications
- 73
- Assignees
- 126
- Inventors
- 403
- Latest grant
- 12 Dec 2023
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 2 | 0 |
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 5 | 0 |
| 1985 | 5 | 0 |
| 1986 | 9 | 0 |
| 1987 | 10 | 0 |
| 1988 | 11 | 0 |
| 1989 | 8 | 0 |
| 1990 | 9 | 0 |
| 1991 | 5 | 0 |
| 1992 | 5 | 0 |
| 1993 | 9 | 0 |
| 1994 | 7 | 0 |
| 1995 | 6 | 0 |
| 1996 | 8 | 0 |
| 1997 | 17 | 0 |
| 1998 | 11 | 0 |
| 1999 | 15 | 0 |
| 2000 | 16 | 0 |
| 2001 | 11 | 8 |
| 2002 | 20 | 15 |
| 2003 | 15 | 10 |
| 2004 | 11 | 7 |
| 2005 | 8 | 5 |
| 2006 | 4 | 3 |
| 2007 | 2 | 4 |
| 2008 | 1 | 5 |
| 2009 | 2 | 5 |
| 2010 | 5 | 2 |
| 2011 | 4 | 3 |
| 2012 | 4 | 1 |
| 2013 | 0 | 1 |
| 2014 | 2 | 1 |
| 2015 | 3 | 1 |
| 2016 | 0 | 0 |
| 2017 | 1 | 0 |
| 2018 | 0 | 1 |
| 2019 | 1 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 1 |
| 2022 | 0 | 0 |
| 2023 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Substrate transfer device and method of operating the same12 Dec 2023US 11,839,968 B2Kawasaki Jukogyo Kabushiki Kaisha
- Wafer transfer device29 Jan 2019US 10,192,794 B2SK Siltron Co., Ltd.
- Substrate processing apparatus and substrate conveying apparatus for use in the same18 Apr 2017US 9,624,046 B2SCREEN Holdings Co., Ltd.
- Apparatus and method for detecting substrates1 Dec 2015US 9,202,732 B2Kawasaki Jukogyo Kabushiki Kaisha
- Method and apparatus for removing a vertically-oriented substrate from a cassette30 Jun 2015US 9,070,730 B2Varian Semiconductor Equipment Associates, Inc.
- Substrate transfer device and method of operating the same19 Aug 2021US 2021/0252716 A1Kawasaki Jukogyo Kabushiki Kaisha
- Wafer transfer device4 Jan 2018US 2018/0005907 A1LG Siltron Inc.
- Anodizing apparatus29 Oct 2015US 2015/0308008 A1Solexel, Inc.
- Substrate processing apparatus and substrate conveying apparatus for use in the same25 Dec 2014US 2014/0377044 A1Dainippon Screen Mfg.Co., Ltd.
- Method and apparatus for removing a vertically-oriented substrate from a cassette11 Apr 2013US 2013/0089395 A1Varian Semiconductor Equipment Associates, Inc.
Most cited
By later US patents
- Modular wafer transport and processing system655US 4,917,556 AVarian Associates, Inc. · 1990
- Wafer handling apparatus and method583US 4,789,294 ACanon Kabushiki Kaisha · 1988
- Apparatus for transferring semiconductor wafers508US 4,611,966 A1986
- Semiconductor manufacturing method, substrate processing method, and semiconductor manufacturing apparatus487US 6,828,235 B2Hitachi Kokusai Electric Inc. · 2004
- Processing unit for substrate manufacture459US 6,247,245 B1Tokyo Electron Limited · 2001