Method and apparatus for removing a vertically-oriented substrate from a cassette
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsJohn Robert Fairhurst, Jeffrey E. Krampert, Richard J. Hertel
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AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsJohn Robert Fairhurst, Jeffrey E. Krampert, Richard J. Hertel
Estimating the term…
A system and method are disclosed for removing vertically oriented substrates from a cassette. A lifter includes a lifter notch and a stabilizer notch for holding a substrate. The lifter notch engages and lifts the substrate along the substrate ID, while the stabilizer notch captures the substrate OD to prevent lateral movement of the substrate during lifting. In use, the cassette is tilted to bias all substrates to one side and ensure consistent spacing. The lifter moves up into the cassette until the notches are adjacent, but beneath, the ID and OD of a substrate. The lifter is moved laterally to position the notches directly below the ID and OD. Upward movement of the lifter causes the lifter notch to lift the substrate along the ID. The lifter continues upward with the substrate until the substrate clears the top of the cassette. Other embodiments are described and claimed.
A substrate lifter for lifting a substrate having an outside diameter (OD), and inside diameter (ID), and first and second substrate faces, comprising:
A substrate lifter for selectively removing a vertically oriented substrate from a substrate cassette, the vertically oriented substrate having an inside diameter (ID), an outside diameter (OD), the substrate lifter comprising:
A method for removing a vertically oriented substrate from a cassette, comprising:
Dependencies are inferred from the claim text.