US 9,624,046 B2Granted

Substrate processing apparatus and substrate conveying apparatus for use in the same

AssigneeSCREEN Holdings Co., Ltd.

InventorsIchiro Mitsuyoshi, Ryo Muramoto

Life of this patent

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Abstract

A substrate processing apparatus includes a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that laterally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position; a second traversing mechanism that laterally moves a second traverse holding portion along a second traversing path disposed below the first traversing path between the substrate transfer position and the substrate delivery position; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section, the first and second traverse holding portions, and the elevation holding portion each holds a plurality of substrates assuming a vertical posture in a batch manner.

Claims18

Dependent claims

A substrate conveying apparatus, comprising:

a substrate processing section which defines a horizontal direction;
a batch hand that holds a plurality of substrates assuming a horizontal posture piled together in a batch manner;
a batch-hand advancing-retreating mechanism that horizontally advances and retreats the batch hand;
a one-by-one hand that holds a single substrate assuming a horizontal posture;
a one-by-one-hand advancing-retreating mechanism that horizontally advances and retreats the one-by-one hand, independently of movement of the batch hand;
a holding base that holds the batch-hand advancing-retreating mechanism and the one-by-one-hand advancing-retreating mechanism;
wherein the batch-hand advancing-retreating mechanism includes a pair of batch-hand linear guides supported on the holding base and extending in parallel with each other, and a batch-hand advancing-retreating bracket coupled to the pair of batch-hand linear guides and configured to advance and retreat while holding the batch hand;
and
wherein the one-by-one-hand advancing-retreating mechanism includes a single one-by-one-hand linear guide supported on the holding base between the pair of batch-hand linear guides and extending in parallel with the pair of batch-hand linear guides, and a one-by-one-hand advancing-retreating bracket coupled to the single one-by-one-hand linear guide and configured to advance and retreat while holding the one-by-one-hand;
an elevation mechanism that moves the holding base upwardly and downwardly;
and
a rotation mechanism that rotates the holding base around a rotation axis line extending in a vertical direction while at least one of said batch hand and said one-by-one hand is holding a corresponding plurality of substrates or a single substrate, said substrates or substrate assuming a horizontal posture.

9 more elements

A substrate processing apparatus, comprising:

a substrate processing section which defines a horizontal direction;
a pod holding portion that holds a pod containing a plurality of substrates piled together;
a substrate holding portion that holds a plurality of substrates;
and
a substrate conveying apparatus that conveys substrates between the pod held by the pod holding portion and the substrate holding portion;
the substrate conveying apparatus including:
a batch hand that holds a plurality of substrates assuming a horizontal posture piled together in a batch manner;
a batch-hand advancing-retreating mechanism that horizontally advances and retreats the batch hand;
a one-by-one hand that holds a single substrate assuming a horizontal posture;
a one-by-one-hand advancing-retreating mechanism that horizontally advances and retreats the one-by-one hand, independently of movement of the batch hand;
a holding base that holds the batch-hand advancing-retreating mechanism and the one-by-one-hand advancing-retreating mechanism;
wherein the batch-hand advancing-retreating mechanism includes a pair of batch-hand linear guides supported on the holding base and extending in parallel with each other, and a batch-hand advancing-retreating bracket coupled to the pair of batch-hand linear guides and configured to advance and retreat while holding the batch hand;
and
wherein the one-by-one-hand advancing-retreating mechanism includes a single one-by-one-hand linear guide supported on the holding base between the pair of batch-hand linear guides and extending in parallel with the pair of batch-hand linear guides, and a one-by-one-hand advancing-retreating bracket coupled to the single one-by-one-hand linear guide and configured to advance and retreat while holding the one-by-one-hand;
an elevation mechanism that moves the holding base upwardly and downwardly;
and
a rotation mechanism that rotates the holding base around a rotation axis line extending in a vertical direction while at least one of said batch hand and said one-by-one hand is holding a corresponding plurality of substrates or a single substrate, said substrates or substrate assuming a horizontal posture.

14 more elements

Dependencies are inferred from the claim text.

Facts

Application: 14/482,656Filed 10 Sep 2014 · continuation
Priority: JP 2008-23427312 Sep 2008
Published: US 2014/0377044 A125 Dec 2014
Granted: 18 Apr 2017
Term ends: Not estimatedThe source records don’t support an estimate.

Classification12 codes

B65G 59/02
De-stacking of articles: de-stacking from the top of the stack
B65G 25/04
Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of…
B65G 49/061
For fragile sheets, e.g. glass: lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction…
B65G 49/067
For fragile sheets, e.g. glass: sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass

Family

Application12/557,097Parent of this continuation · filed 10 Sep 2009
US 2014/0377044 A1Pre-grant publication · published 25 Dec 2014
US 8,851,821 B2Parent of this continuation
US 2010/0068014 A1Published application
US 9,624,046 B2This patent

From the US filing history. Foreign family members aren’t listed.