Anodizing apparatus
AssigneeSolexel, Inc.
InventorsYasuyoshi MIYAJI, Noriyuki HAYASHI, Takamitsu INAHARA, Takao YONEHARA, Karl-Josef KRAMER, Subramanian TAMILMANI
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AssigneeSolexel, Inc.
InventorsYasuyoshi MIYAJI, Noriyuki HAYASHI, Takamitsu INAHARA, Takao YONEHARA, Karl-Josef KRAMER, Subramanian TAMILMANI
Estimating the term…
An apparatus for anodizing substrates immersed in an electrolyte solution. A substrate holder mounted in a storage tank includes a first support unit having first support elements for supporting, in a liquid-tight condition, portions of the substrates, and a second support unit attachable to and detachable from the first support unit and having second support elements for supporting, in a liquid-tight condition, the remaining portions of the substrates. The second support unit includes a first portion second support unit having support elements for supporting first portions of the remaining portions of the surfaces of the substrates, and a second portion second support unit having support elements for supporting second portions of the remaining portions of the surfaces of the substrates.
An anodizing apparatus for causing an anodizing reaction on substrates immersed in an electrolyte solution, comprising:
Dependencies are inferred from the claim text.