H10P 72/57
Mask-wafer alignment
Official title: {Mask-wafer alignment}
H10P72/57 (Mask-wafer alignment) appears on 438 US grants and 422 published applications in this corpus.
Search patents in H10P- Granted patents
- 438
- Published applications
- 422
- Assignees
- 200
- Inventors
- 1,010
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 1 | 0 |
| 1978 | 2 | 0 |
| 1979 | 0 | 0 |
| 1980 | 2 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 3 | 0 |
| 1984 | 4 | 0 |
| 1985 | 3 | 0 |
| 1986 | 1 | 0 |
| 1987 | 4 | 0 |
| 1988 | 2 | 0 |
| 1989 | 8 | 0 |
| 1990 | 7 | 0 |
| 1991 | 2 | 0 |
| 1992 | 8 | 0 |
| 1993 | 13 | 0 |
| 1994 | 9 | 0 |
| 1995 | 4 | 0 |
| 1996 | 3 | 0 |
| 1997 | 2 | 0 |
| 1998 | 9 | 0 |
| 1999 | 5 | 0 |
| 2000 | 8 | 0 |
| 2001 | 9 | 4 |
| 2002 | 10 | 13 |
| 2003 | 9 | 15 |
| 2004 | 10 | 13 |
| 2005 | 15 | 24 |
| 2006 | 18 | 15 |
| 2007 | 15 | 15 |
| 2008 | 8 | 20 |
| 2009 | 9 | 19 |
| 2010 | 9 | 13 |
| 2011 | 11 | 9 |
| 2012 | 8 | 7 |
| 2013 | 10 | 11 |
| 2014 | 11 | 9 |
| 2015 | 11 | 14 |
| 2016 | 15 | 17 |
| 2017 | 15 | 23 |
| 2018 | 14 | 19 |
| 2019 | 19 | 22 |
| 2020 | 22 | 35 |
| 2021 | 17 | 26 |
| 2022 | 19 | 27 |
| 2023 | 21 | 17 |
| 2024 | 13 | 15 |
| 2025 | 11 | 10 |
| 2026 | 6 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Split double sided wafer and reticle clamps25 Aug 2026US 12,717,249 B2ASML Holding N. V.
- Wafer notch positioning detection7 Jul 2026US 12,677,634 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Deposition apparatus7 Apr 2026US 12,595,544 B2Samsung Display Co., Ltd.
- Pre-jig wafer carrier disc installation/uninstallation device and method thereof20 Jan 2026US 12,528,652 B2Kingtek Elec-Technology Co., Ltd.
- Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device20 Jan 2026US 12,529,876 B2Nearfield Instruments B.V.
- Wafer notch positioning detection1 Oct 2026US 2026/0305248 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Method of performing a qualification action on an exposure apparatus24 Sep 2026US 2026/0288014 A1ASML Netherlands B. V.
- Semiconductor Device and Method of Making Using Ultraviolet Light for Photonics Protection17 Sep 2026US 2026/0283012 A1STATS ChipPAC Pte. Ltd.
- Positioning device for positioning a first substrate relative to a second substrate16 Jul 2026US 2026/0202763 A1SUSS MicroTec Solutions GmbH & Co. KG
- Panel forming apparatus and panel forming method using the same2 Jul 2026US 2026/0190847 A1Samsung Display Co., Ltd.
Most cited
By later US patents
- Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device918US 5,969,441 AASM Lithography B. V. · 1999
- Guideless stage with isolated reaction stage460US 5,528,118 ANikon Precision Inc. · 1996
- Positioning device having two object holders379US 6,262,796 B1ASM Lithography B. V. · 2001
- Mixed exposure for large die163US 11,264,357 B1Invensas Corporation · 2022
- Single plane orthogonally movable drive system138US 4,654,571 A1987